@inproceedings{ad04b0a83818406d8f97263518dd0d9a,
title = "Yield improvement in fabrication of edge emitting transistor lasers by optimized BCB planarization",
abstract = "An analysis into the low yield of the Transistor Laser process is performed and it is determined that the BCB planarizing polymer's spin non-uniformity is the primary cause of the failures observed. The process is modified to mitigate this effect and steps are outlined to further refine process control monitors in new layouts. The revised process is used to fabricate transistor lasers exhibiting > 14Ghz f-3dboptical bandwidth at 15°C.",
keywords = "BCB, HBT, Transistor laser, Yield",
author = "Rohan Bambery and Milton Feng",
year = "2013",
language = "English (US)",
isbn = "1893580210",
series = "2013 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2013",
pages = "379--382",
booktitle = "2013 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2013",
note = "28th International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2013 ; Conference date: 13-05-2013 Through 16-05-2013",
}