Wideband Spurious-Free Lithium Niobate RF-MEMS Filters

Yong Ha Song, Songbin Gong

Research output: Contribution to journalArticle

Abstract

This paper reports on the demonstration of wideband spurious-free radio frequency micromechanical systems filters based on one-port shear horizontal (SH0) mode lithium niobate (LiNbO3) laterally vibrating resonators (LVRs). The fabricated filter has been demonstrated with an unprecedented spectral range of spurious-free response (290% of the center frequency), a low insertion loss of 2.1 dB, an excellent 30-dB shape factor of 1.48, and a 3-dB fractional bandwidth of 8.9%. The spurious free response is achieved by optimizing the building blocks of the filters, namely the LVRs, and employing a spurious mitigation design based on arraying single resonators with only two electrodes. The low loss and excellent shape factor are enabled by the demonstrated high electromechanical coupling (kt2=16.1%), high quality factor (Q=1093), and high figure of merit (FoM = 154) of the fabricated resonator arrays. [2016-0250]

Original languageEnglish (US)
Article number7878516
Pages (from-to)820-828
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume26
Issue number4
DOIs
StatePublished - Aug 2017

Keywords

  • Lithium niobate
  • high electromechanical coupling
  • ladder filters
  • laterally vibrating resonators
  • piezoelectric resonators
  • quality factor
  • spurious mode suppression
  • wideband filters

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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