Wideband Spurious-Free Lithium Niobate RF-MEMS Filters

Yong Ha Song, Songbin Gong

Research output: Contribution to journalArticle

Abstract

This paper reports on the demonstration of wideband spurious-free radio frequency micromechanical systems filters based on one-port shear horizontal (SH0) mode lithium niobate (LiNbO3) laterally vibrating resonators (LVRs). The fabricated filter has been demonstrated with an unprecedented spectral range of spurious-free response (290% of the center frequency), a low insertion loss of 2.1 dB, an excellent 30-dB shape factor of 1.48, and a 3-dB fractional bandwidth of 8.9%. The spurious free response is achieved by optimizing the building blocks of the filters, namely the LVRs, and employing a spurious mitigation design based on arraying single resonators with only two electrodes. The low loss and excellent shape factor are enabled by the demonstrated high electromechanical coupling (kt2=16.1%), high quality factor (Q=1093), and high figure of merit (FoM = 154) of the fabricated resonator arrays. [2016-0250]

Original languageEnglish (US)
Article number7878516
Pages (from-to)820-828
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume26
Issue number4
DOIs
StatePublished - Aug 2017

Fingerprint

MEMS
Resonators
Lithium
Electromechanical coupling
Insertion losses
Demonstrations
Bandwidth
Electrodes

Keywords

  • Lithium niobate
  • high electromechanical coupling
  • ladder filters
  • laterally vibrating resonators
  • piezoelectric resonators
  • quality factor
  • spurious mode suppression
  • wideband filters

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Wideband Spurious-Free Lithium Niobate RF-MEMS Filters. / Song, Yong Ha; Gong, Songbin.

In: Journal of Microelectromechanical Systems, Vol. 26, No. 4, 7878516, 08.2017, p. 820-828.

Research output: Contribution to journalArticle

@article{1d2b568190804deb8c51dd95dcae9fdc,
title = "Wideband Spurious-Free Lithium Niobate RF-MEMS Filters",
abstract = "This paper reports on the demonstration of wideband spurious-free radio frequency micromechanical systems filters based on one-port shear horizontal (SH0) mode lithium niobate (LiNbO3) laterally vibrating resonators (LVRs). The fabricated filter has been demonstrated with an unprecedented spectral range of spurious-free response (290{\%} of the center frequency), a low insertion loss of 2.1 dB, an excellent 30-dB shape factor of 1.48, and a 3-dB fractional bandwidth of 8.9{\%}. The spurious free response is achieved by optimizing the building blocks of the filters, namely the LVRs, and employing a spurious mitigation design based on arraying single resonators with only two electrodes. The low loss and excellent shape factor are enabled by the demonstrated high electromechanical coupling (kt2=16.1{\%}), high quality factor (Q=1093), and high figure of merit (FoM = 154) of the fabricated resonator arrays. [2016-0250]",
keywords = "Lithium niobate, high electromechanical coupling, ladder filters, laterally vibrating resonators, piezoelectric resonators, quality factor, spurious mode suppression, wideband filters",
author = "Song, {Yong Ha} and Songbin Gong",
year = "2017",
month = "8",
doi = "10.1109/JMEMS.2017.2671445",
language = "English (US)",
volume = "26",
pages = "820--828",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "4",

}

TY - JOUR

T1 - Wideband Spurious-Free Lithium Niobate RF-MEMS Filters

AU - Song, Yong Ha

AU - Gong, Songbin

PY - 2017/8

Y1 - 2017/8

N2 - This paper reports on the demonstration of wideband spurious-free radio frequency micromechanical systems filters based on one-port shear horizontal (SH0) mode lithium niobate (LiNbO3) laterally vibrating resonators (LVRs). The fabricated filter has been demonstrated with an unprecedented spectral range of spurious-free response (290% of the center frequency), a low insertion loss of 2.1 dB, an excellent 30-dB shape factor of 1.48, and a 3-dB fractional bandwidth of 8.9%. The spurious free response is achieved by optimizing the building blocks of the filters, namely the LVRs, and employing a spurious mitigation design based on arraying single resonators with only two electrodes. The low loss and excellent shape factor are enabled by the demonstrated high electromechanical coupling (kt2=16.1%), high quality factor (Q=1093), and high figure of merit (FoM = 154) of the fabricated resonator arrays. [2016-0250]

AB - This paper reports on the demonstration of wideband spurious-free radio frequency micromechanical systems filters based on one-port shear horizontal (SH0) mode lithium niobate (LiNbO3) laterally vibrating resonators (LVRs). The fabricated filter has been demonstrated with an unprecedented spectral range of spurious-free response (290% of the center frequency), a low insertion loss of 2.1 dB, an excellent 30-dB shape factor of 1.48, and a 3-dB fractional bandwidth of 8.9%. The spurious free response is achieved by optimizing the building blocks of the filters, namely the LVRs, and employing a spurious mitigation design based on arraying single resonators with only two electrodes. The low loss and excellent shape factor are enabled by the demonstrated high electromechanical coupling (kt2=16.1%), high quality factor (Q=1093), and high figure of merit (FoM = 154) of the fabricated resonator arrays. [2016-0250]

KW - Lithium niobate

KW - high electromechanical coupling

KW - ladder filters

KW - laterally vibrating resonators

KW - piezoelectric resonators

KW - quality factor

KW - spurious mode suppression

KW - wideband filters

UR - http://www.scopus.com/inward/record.url?scp=85015648994&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85015648994&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2017.2671445

DO - 10.1109/JMEMS.2017.2671445

M3 - Article

AN - SCOPUS:85015648994

VL - 26

SP - 820

EP - 828

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 4

M1 - 7878516

ER -