Wideband RF Filters Using Medium-Scale Integration of Lithium Niobate Laterally Vibrating Resonators

Yong Ha Song, Songbin Gong

Research output: Contribution to journalArticlepeer-review


This letter presents wideband spurious-free microelectromechanical systems (MEMSs) filters based on shear horizontal (SH0) mode Lithium Niobate (LiNbO3) laterally vibrating resonators. The filters, monolithically fabricated on the same chip, have center frequencies at 400 and 750 MHz. The measured performance exhibits in-band ripple-free response, a low insertion loss (IL) of 1.7 dB, a 30-dB shape factor of 1.41, and a 3-dB fractional bandwidth (FBW) of 9.6 %-the largest reported for MEMS-resonator-based filters. The high performance was collaboratively enabled by the LiNbO3 material and filter design. The excellent piezoelectric coupling and low acoustic loss in LiNbO3 thin film ensure the low IL and large FBW, while the medium-scale integration of 200 spurious mode-free resonators fully harnesses the potential of LiNbO3 material without introducing spurious response. The filters have a device footprint less than 360 × 350μm-2 , thus suitable for RF frontends in handheld wireless devices.

Original languageEnglish (US)
Article number7839246
Pages (from-to)387-390
Number of pages4
JournalIEEE Electron Device Letters
Issue number3
StatePublished - Mar 2017


  • Lithium niobate
  • ladder filters
  • micro/nanoelectromechanical systems
  • piezoelectric resonators
  • spurious mode suppression
  • wideband filters

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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