Wideband Hybrid Monolithic Lithium Niobate Acoustic Filter in the K-Band

Liuqing Gao, Yansong Yang, Songbin Gong

Research output: Contribution to journalArticlepeer-review

Abstract

This article presents the design approach and the first demonstration of a wideband hybrid monolithic acoustic filter in the K-band, which exceeds the limitation of electromechanical coupling on the fractional bandwidth (FBW) of acoustic filters. The hybrid filter utilizes the codesign of electromagnetic (EM) and acoustic to attain wide bandwidth while keeping the advantages of small sizes and high Q in the acoustic domain. The performance trade space and design flow of the hybrid filter are also presented in this article, which allows this technology to be applied for filters with different center frequencies and FBWs. The hybrid filter is simulated by hybridizing the EM and acoustic finite element analysis, which are carried out separately and combined at a system level. The fabricated filter built with resonators having an electromechanical coupling of 0.7% based on the seventh-order antisymmetric Lamb wave mode (A7) has a 3-dB FBW of 2.4% at 19 GHz and a compact footprint of 1.4 mm2.

Original languageEnglish (US)
Article number9245563
Pages (from-to)1408-1417
Number of pages10
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume68
Issue number4
DOIs
StatePublished - Apr 2021

Keywords

  • K-band
  • microelectromechanical systems (MEMSs)
  • millimeter-wave devices
  • piezoelectric devices

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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