A MEM capacitor having a capacitance plate nearer a movable plate than a separate bias plate. Voltage potential between the bias plate and movable plate determines the value of capacitance between the movable plate and the capacitance plate. In a preferred MEM capacitor, the movable plate is suspended over two fixed plates, a bias plate and a capacitance plate. The movable plate is disposed opposite both the bias plate and the capacitance plate. A distance between opposing surfaces of the capacitance plate and the movable plate is less than a distance between the bias plate and the capacitance plate. Preferably, the relative difference in distances between the plates is accomplished by a mechanically suspended movable plate that is shaped to have portions in at least two separate planes.
|Original language||English (US)|
|U.S. patent number||6418006|
|State||Published - Jul 9 2002|