TY - GEN
T1 - Wide-field diffraction phase microscope for precision metrology
AU - Rajshekhar, Gannavarpu
AU - Bhaduri, Basanta
AU - Edwards, Chris
AU - Zhou, Renjie
AU - Goddard, Lynford L.
AU - Popescu, Gabriel
PY - 2014
Y1 - 2014
N2 - We demonstrate a wide-field diffraction phase microscope for large field of view quantitative phase imaging. The instrument provides an extremely stable, single-shot, full-field and robust imaging modality for nanoscale metrology and SLM characterization.
AB - We demonstrate a wide-field diffraction phase microscope for large field of view quantitative phase imaging. The instrument provides an extremely stable, single-shot, full-field and robust imaging modality for nanoscale metrology and SLM characterization.
UR - http://www.scopus.com/inward/record.url?scp=85087605703&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85087605703&partnerID=8YFLogxK
U2 - 10.1364/dh.2014.dth1b.2
DO - 10.1364/dh.2014.dth1b.2
M3 - Conference contribution
AN - SCOPUS:85087605703
SN - 9781557523082
SN - 9781557523082
T3 - Optics InfoBase Conference Papers
BT - Imaging and Applied Optics - Digital Holography and Three-Dimensional Imaging, DH 2014
PB - Optical Society of America (OSA)
T2 - Digital Holography and Three-Dimensional Imaging, DH 2014
Y2 - 13 July 2014 through 17 July 2014
ER -