Wide-field diffraction phase microscope for precision metrology

Gannavarpu Rajshekhar, Basanta Bhaduri, Chris Edwards, Renjie Zhou, Lynford L Goddard, Gabriel Popescu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a wide-field diffraction phase microscope for large field of view quantitative phase imaging. The instrument provides an extremely stable, single-shot, full-field and robust imaging modality for nanoscale metrology and SLM characterization.

Original languageEnglish (US)
Title of host publicationImaging and Applied Optics - Digital Holography and Three-Dimensional Imaging, DH 2014
PublisherOptical Society of American (OSA)
ISBN (Print)9781557523082
StatePublished - Jan 1 2014
EventDigital Holography and Three-Dimensional Imaging, DH 2014 - Seattle, WA, United States
Duration: Jul 13 2014Jul 17 2014

Other

OtherDigital Holography and Three-Dimensional Imaging, DH 2014
CountryUnited States
CitySeattle, WA
Period7/13/147/17/14

Fingerprint

metrology
shot
field of view
Microscopes
Diffraction
microscopes
Imaging techniques
diffraction

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Rajshekhar, G., Bhaduri, B., Edwards, C., Zhou, R., Goddard, L. L., & Popescu, G. (2014). Wide-field diffraction phase microscope for precision metrology. In Imaging and Applied Optics - Digital Holography and Three-Dimensional Imaging, DH 2014 Optical Society of American (OSA).

Wide-field diffraction phase microscope for precision metrology. / Rajshekhar, Gannavarpu; Bhaduri, Basanta; Edwards, Chris; Zhou, Renjie; Goddard, Lynford L; Popescu, Gabriel.

Imaging and Applied Optics - Digital Holography and Three-Dimensional Imaging, DH 2014. Optical Society of American (OSA), 2014.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rajshekhar, G, Bhaduri, B, Edwards, C, Zhou, R, Goddard, LL & Popescu, G 2014, Wide-field diffraction phase microscope for precision metrology. in Imaging and Applied Optics - Digital Holography and Three-Dimensional Imaging, DH 2014. Optical Society of American (OSA), Digital Holography and Three-Dimensional Imaging, DH 2014, Seattle, WA, United States, 7/13/14.
Rajshekhar G, Bhaduri B, Edwards C, Zhou R, Goddard LL, Popescu G. Wide-field diffraction phase microscope for precision metrology. In Imaging and Applied Optics - Digital Holography and Three-Dimensional Imaging, DH 2014. Optical Society of American (OSA). 2014
Rajshekhar, Gannavarpu ; Bhaduri, Basanta ; Edwards, Chris ; Zhou, Renjie ; Goddard, Lynford L ; Popescu, Gabriel. / Wide-field diffraction phase microscope for precision metrology. Imaging and Applied Optics - Digital Holography and Three-Dimensional Imaging, DH 2014. Optical Society of American (OSA), 2014.
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