White-light interferometric microscopy for wafer defect inspection

Renjie Zhou, Christopher Edwards, Casey Bryniarski, Marjorie F. Dallmann, Gabriel Popescu, Lynford L Goddard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

White-light imaging systems are free of laser-speckle. Thus, they offer high sensitivity for optical defect metrology, especially when used with interferometry based quantitative phase imaging. This can be a potential solution for wafer inspection beyond the 9 nm node. Recently, we built a white-light epi-illumination diffraction phase microscopy (epi-wDPM) for wafer defect inspection. The system is also equipped with an XYZ scanning stage and real-time processing. Preliminary results have demonstrated detection of 15 nm by 90 nm in a 9 nm node densely patterned wafer with bright-field imaging. Currently, we are implementing phase imaging with epi-wDPM for additional sensitivity.

Original languageEnglish (US)
Title of host publicationQuantitative Phase Imaging
EditorsYongKeun Park, Gabriel Popescu
PublisherSPIE
ISBN (Electronic)9781628414264
DOIs
StatePublished - Jan 1 2015
Event1st Conference on Quantitative Phase Imaging, QPI 2015 - San Francisco, United States
Duration: Feb 7 2015Feb 10 2015

Publication series

NameProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume9336
ISSN (Print)1605-7422

Other

Other1st Conference on Quantitative Phase Imaging, QPI 2015
CountryUnited States
CitySan Francisco
Period2/7/152/10/15

Fingerprint

Optical microscopy
inspection
Microscopy
Inspection
wafers
Interferometry
microscopy
Imaging techniques
Light
Defects
defects
Lighting
Lasers
sensitivity
Speckle
Imaging systems
metrology
Microscopic examination
interferometry
Diffraction

Keywords

  • Wafer defect inspection
  • image post-processing
  • interferometric microscopy
  • quantitative phase imaging
  • white-light defect inspection

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Biomaterials
  • Radiology Nuclear Medicine and imaging

Cite this

Zhou, R., Edwards, C., Bryniarski, C., Dallmann, M. F., Popescu, G., & Goddard, L. L. (2015). White-light interferometric microscopy for wafer defect inspection. In Y. Park, & G. Popescu (Eds.), Quantitative Phase Imaging [93362P] (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; Vol. 9336). SPIE. https://doi.org/10.1117/12.2079660

White-light interferometric microscopy for wafer defect inspection. / Zhou, Renjie; Edwards, Christopher; Bryniarski, Casey; Dallmann, Marjorie F.; Popescu, Gabriel; Goddard, Lynford L.

Quantitative Phase Imaging. ed. / YongKeun Park; Gabriel Popescu. SPIE, 2015. 93362P (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; Vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhou, R, Edwards, C, Bryniarski, C, Dallmann, MF, Popescu, G & Goddard, LL 2015, White-light interferometric microscopy for wafer defect inspection. in Y Park & G Popescu (eds), Quantitative Phase Imaging., 93362P, Progress in Biomedical Optics and Imaging - Proceedings of SPIE, vol. 9336, SPIE, 1st Conference on Quantitative Phase Imaging, QPI 2015, San Francisco, United States, 2/7/15. https://doi.org/10.1117/12.2079660
Zhou R, Edwards C, Bryniarski C, Dallmann MF, Popescu G, Goddard LL. White-light interferometric microscopy for wafer defect inspection. In Park Y, Popescu G, editors, Quantitative Phase Imaging. SPIE. 2015. 93362P. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE). https://doi.org/10.1117/12.2079660
Zhou, Renjie ; Edwards, Christopher ; Bryniarski, Casey ; Dallmann, Marjorie F. ; Popescu, Gabriel ; Goddard, Lynford L. / White-light interferometric microscopy for wafer defect inspection. Quantitative Phase Imaging. editor / YongKeun Park ; Gabriel Popescu. SPIE, 2015. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE).
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