TY - GEN
T1 - White-light interferometric microscopy for wafer defect inspection
AU - Zhou, Renjie
AU - Edwards, Christopher
AU - Bryniarski, Casey
AU - Dallmann, Marjorie F.
AU - Popescu, Gabriel
AU - Goddard, Lynford L.
N1 - Publisher Copyright:
© 2015 SPIE.
PY - 2015
Y1 - 2015
N2 - White-light imaging systems are free of laser-speckle. Thus, they offer high sensitivity for optical defect metrology, especially when used with interferometry based quantitative phase imaging. This can be a potential solution for wafer inspection beyond the 9 nm node. Recently, we built a white-light epi-illumination diffraction phase microscopy (epi-wDPM) for wafer defect inspection. The system is also equipped with an XYZ scanning stage and real-time processing. Preliminary results have demonstrated detection of 15 nm by 90 nm in a 9 nm node densely patterned wafer with bright-field imaging. Currently, we are implementing phase imaging with epi-wDPM for additional sensitivity.
AB - White-light imaging systems are free of laser-speckle. Thus, they offer high sensitivity for optical defect metrology, especially when used with interferometry based quantitative phase imaging. This can be a potential solution for wafer inspection beyond the 9 nm node. Recently, we built a white-light epi-illumination diffraction phase microscopy (epi-wDPM) for wafer defect inspection. The system is also equipped with an XYZ scanning stage and real-time processing. Preliminary results have demonstrated detection of 15 nm by 90 nm in a 9 nm node densely patterned wafer with bright-field imaging. Currently, we are implementing phase imaging with epi-wDPM for additional sensitivity.
KW - Wafer defect inspection
KW - image post-processing
KW - interferometric microscopy
KW - quantitative phase imaging
KW - white-light defect inspection
UR - http://www.scopus.com/inward/record.url?scp=84931360759&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84931360759&partnerID=8YFLogxK
U2 - 10.1117/12.2079660
DO - 10.1117/12.2079660
M3 - Conference contribution
AN - SCOPUS:84931360759
T3 - Progress in Biomedical Optics and Imaging - Proceedings of SPIE
BT - Quantitative Phase Imaging
A2 - Park, YongKeun
A2 - Popescu, Gabriel
PB - SPIE
T2 - 1st Conference on Quantitative Phase Imaging, QPI 2015
Y2 - 7 February 2015 through 10 February 2015
ER -