Wet etch, dry etch, and MacEtch of β-Ga₂O₃: A review of characteristics and mechanism

Keyphrases

• Wet Etching 100%
• Metal-assisted Chemical Etching 100%
• Dry Etching 100%
• Ga2O3 100%
• Etching Process 33%
• Etching Mechanism 33%
• Photoelectrochemical Etching 33%
• Metal Ions 16%
• Aspect Ratio 16%
• Etching Rate 16%
• Orientation Dependence 16%
• Optoelectronic Applications 16%
• Wide Bandgap 16%
• Surface Quality 16%
• Reactive Ion Etching 16%
• Etched Surface 16%
• Deep Ultraviolet 16%
• Interface Characteristics 16%
• High Power Electronics 16%
• High Breakdown Field 16%
• Ultraviolet Optoelectronics 16%
• Ultrawide Bandgap Material 16%

Material Science

• Wet Etching 100%
• Surface Property 100%
• Reactive Ion Etching 100%
• Surface (Surface Science) 100%