@inproceedings{5723e411ea1a4a4a92d4d32ca983b961,
title = "Weighted electrode configuration for electromechanical coupling enhancement in a new class of micromachined Lithium Niobate laterally vibrating resonators",
abstract = "This paper reports on an electromechanical coupling (kt 2) enhancement technique for a new class of Lithium Niobate based laterally vibrating MEMS resonators. This technique uses a weighted electrode configuration to experimentally demonstrate a more than 2X enhancement of the device kt2. The resonator orientated 30° to +Y in the X-cut plane achieved a kt2 of 21.7%, and a quality factor of 1300, effectively corresponding to a figure of merit of 280 -the highest demonstrated to date for laterally vibrating resonators.",
keywords = "Lithium Niobate, MEMS, electromechanical coupling, quality factor, resonators, wideband filter",
author = "Songbin Gong and Gianluca Piazza",
year = "2012",
month = dec,
day = "1",
doi = "10.1109/IEDM.2012.6479050",
language = "English (US)",
isbn = "9781467348706",
series = "Technical Digest - International Electron Devices Meeting, IEDM",
pages = "15.6.1--15.6.4",
booktitle = "2012 IEEE International Electron Devices Meeting, IEDM 2012",
note = "2012 IEEE International Electron Devices Meeting, IEDM 2012 ; Conference date: 10-12-2012 Through 13-12-2012",
}