Weighted electrode configuration for electromechanical coupling enhancement in a new class of micromachined Lithium Niobate laterally vibrating resonators

Songbin Gong; Gianluca Piazza

doi:10.1109/IEDM.2012.6479050

Weighted electrode configuration for electromechanical coupling enhancement in a new class of micromachined Lithium Niobate laterally vibrating resonators

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports on an electromechanical coupling (k_t ²) enhancement technique for a new class of Lithium Niobate based laterally vibrating MEMS resonators. This technique uses a weighted electrode configuration to experimentally demonstrate a more than 2X enhancement of the device k_t². The resonator orientated 30° to +Y in the X-cut plane achieved a k_t² of 21.7%, and a quality factor of 1300, effectively corresponding to a figure of merit of 280 -the highest demonstrated to date for laterally vibrating resonators.

Original language	English (US)
Title of host publication	2012 IEEE International Electron Devices Meeting, IEDM 2012
Pages	15.6.1-15.6.4
DOIs	https://doi.org/10.1109/IEDM.2012.6479050
State	Published - Dec 1 2012
Externally published	Yes
Event	2012 IEEE International Electron Devices Meeting, IEDM 2012 - San Francisco, CA, United States Duration: Dec 10 2012 → Dec 13 2012

Publication series

Name	Technical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)	0163-1918

Other

Other	2012 IEEE International Electron Devices Meeting, IEDM 2012
Country	United States
City	San Francisco, CA
Period	12/10/12 → 12/13/12

Keywords

Lithium Niobate
MEMS
electromechanical coupling
quality factor
resonators
wideband filter

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

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10.1109/IEDM.2012.6479050

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Gong, S., & Piazza, G. (2012). Weighted electrode configuration for electromechanical coupling enhancement in a new class of micromachined Lithium Niobate laterally vibrating resonators. In 2012 IEEE International Electron Devices Meeting, IEDM 2012 (pp. 15.6.1-15.6.4). [6479050] (Technical Digest - International Electron Devices Meeting, IEDM). https://doi.org/10.1109/IEDM.2012.6479050

Weighted electrode configuration for electromechanical coupling enhancement in a new class of micromachined Lithium Niobate laterally vibrating resonators. / Gong, Songbin; Piazza, Gianluca.

2012 IEEE International Electron Devices Meeting, IEDM 2012. 2012. p. 15.6.1-15.6.4 6479050 (Technical Digest - International Electron Devices Meeting, IEDM).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Gong, S & Piazza, G 2012, Weighted electrode configuration for electromechanical coupling enhancement in a new class of micromachined Lithium Niobate laterally vibrating resonators. in 2012 IEEE International Electron Devices Meeting, IEDM 2012., 6479050, Technical Digest - International Electron Devices Meeting, IEDM, pp. 15.6.1-15.6.4, 2012 IEEE International Electron Devices Meeting, IEDM 2012, San Francisco, CA, United States, 12/10/12. https://doi.org/10.1109/IEDM.2012.6479050

Gong S, Piazza G. Weighted electrode configuration for electromechanical coupling enhancement in a new class of micromachined Lithium Niobate laterally vibrating resonators. In 2012 IEEE International Electron Devices Meeting, IEDM 2012. 2012. p. 15.6.1-15.6.4. 6479050. (Technical Digest - International Electron Devices Meeting, IEDM). https://doi.org/10.1109/IEDM.2012.6479050

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title = "Weighted electrode configuration for electromechanical coupling enhancement in a new class of micromachined Lithium Niobate laterally vibrating resonators",

abstract = "This paper reports on an electromechanical coupling (kt 2) enhancement technique for a new class of Lithium Niobate based laterally vibrating MEMS resonators. This technique uses a weighted electrode configuration to experimentally demonstrate a more than 2X enhancement of the device kt2. The resonator orientated 30° to +Y in the X-cut plane achieved a kt2 of 21.7%, and a quality factor of 1300, effectively corresponding to a figure of merit of 280 -the highest demonstrated to date for laterally vibrating resonators.",

keywords = "Lithium Niobate, MEMS, electromechanical coupling, quality factor, resonators, wideband filter",

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Weighted electrode configuration for electromechanical coupling enhancement in a new class of micromachined Lithium Niobate laterally vibrating resonators

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Keywords

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