Weighted electrode configuration for electromechanical coupling enhancement in a new class of micromachined Lithium Niobate laterally vibrating resonators

Songbin Gong, Gianluca Piazza

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on an electromechanical coupling (kt 2) enhancement technique for a new class of Lithium Niobate based laterally vibrating MEMS resonators. This technique uses a weighted electrode configuration to experimentally demonstrate a more than 2X enhancement of the device kt2. The resonator orientated 30° to +Y in the X-cut plane achieved a kt2 of 21.7%, and a quality factor of 1300, effectively corresponding to a figure of merit of 280 -the highest demonstrated to date for laterally vibrating resonators.

Original languageEnglish (US)
Title of host publication2012 IEEE International Electron Devices Meeting, IEDM 2012
Pages15.6.1-15.6.4
DOIs
StatePublished - Dec 1 2012
Externally publishedYes
Event2012 IEEE International Electron Devices Meeting, IEDM 2012 - San Francisco, CA, United States
Duration: Dec 10 2012Dec 13 2012

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)0163-1918

Other

Other2012 IEEE International Electron Devices Meeting, IEDM 2012
CountryUnited States
CitySan Francisco, CA
Period12/10/1212/13/12

Keywords

  • Lithium Niobate
  • MEMS
  • electromechanical coupling
  • quality factor
  • resonators
  • wideband filter

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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