WCDM2 - Wafer-level charged device model testing with high repeatability

Nathan Jack, Timothy J. Maloney, Bruce Chou, Elyse Rosenbaum

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

CDM-like unipolar pulses are generated at the wafer level with excellent repeatability and linearity. Pulse width and rise time resemble that of FICDM testers. In-situ pre- and post-stress curve tracing reveals the current failure threshold for the device under test.

Original languageEnglish (US)
Title of host publication2011 International Reliability Physics Symposium, IRPS 2011
DOIs
StatePublished - Jun 23 2011
Event49th International Reliability Physics Symposium, IRPS 2011 - Monterey, CA, United States
Duration: Apr 10 2011Apr 14 2011

Publication series

NameIEEE International Reliability Physics Symposium Proceedings
ISSN (Print)1541-7026

Other

Other49th International Reliability Physics Symposium, IRPS 2011
CountryUnited States
CityMonterey, CA
Period4/10/114/14/11

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Jack, N., Maloney, T. J., Chou, B., & Rosenbaum, E. (2011). WCDM2 - Wafer-level charged device model testing with high repeatability. In 2011 International Reliability Physics Symposium, IRPS 2011 [5784509] (IEEE International Reliability Physics Symposium Proceedings). https://doi.org/10.1109/IRPS.2011.5784509