@inproceedings{426c844c7ab94b89a7935139b6161d50,
title = "Wafer-scale plasmonic and photonic crystal sensors",
abstract = "200 mm diameter wafer-scale fabrication, metrology, and optical modeling results are reviewed for surface plasmon resonance (SPR) sensors based on 2-D metallic nano-dome and nano-hole arrays (NHA's) as well as 1-D photonic crystal sensors based on a leaky-waveguide mode resonance effect, with potential applications in label free sensing, surface enhanced Raman spectroscopy (SERS), and surface-enhanced fluorescence spectroscopy (SEFS). Potential markets include micro-arrays for medical diagnostics, forensic testing, environmental monitoring, and food safety. 1-D and 2-D nanostructures were fabricated on glass, fused silica, and silicon wafers using optical lithography and semiconductor processing techniques. Wafer-scale optical metrology results are compared to FDTD modeling and presented along with application-based performance results, including label-free plasmonic and photonic crystal sensing of both surface binding kinetics and bulk refractive index changes. In addition, SEFS and SERS results are presented for 1-D photonic crystal and 2-D metallic nano-array structures. Normal incidence transmittance results for a 550 nm pitch NHA showed good bulk refractive index sensitivity, however an intensity-based design with 665 nm pitch was chosen for use as a compact, label-free sensor at both 650 and 632.8 nm wavelengths. The optimized NHA sensor gives an SPR shift of about 480 nm per refractive index unit when detecting a series of 0-40% glucose solutions, but according to modeling shows about 10 times greater surface sensitivity when operating at 532 nm. Narrow-band photonic crystal resonance sensors showed quality factors over 200, with reasonable wafer-uniformity in terms of both resonance position and peak height.",
keywords = "SEFS, SERS, SPR, extraordinary optical transmission, guided-mode resonance, label-free sensor, microarray, nano-hole array, photonic crystal",
author = "George, {M. C.} and Liu, {J. N.} and A. Farhang and B. Williamson and M. Black and T. Wangensteen and J. Fraser and R. Petrova and Cunningham, {B. T.}",
year = "2015",
doi = "10.1117/12.2188631",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Tsai, {Din Ping} and Boardman, {Allan D.}",
booktitle = "Plasmonics",
note = "Plasmonics: Metallic Nanostructures and Their Optical Properties XIII ; Conference date: 09-08-2015 Through 13-08-2015",
}