Vision based Iterative Learning Control for a roll to roll micro/nano-manufacturing system

Erick Sutanto, Andrew G. Alleyne

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Fabrication of nano/micro-scale functional devices oftentimes involves multiple steps. In the context of a continuous or semi-continuous manufacturing process, each fabrication step is performed successively in multiple localized zones. As the substrate or the web traverses downstream in the process flow, proper registration of the pre-existing features is necessary prior to entering the next fabrication zone in order to accurately complement previous manufacturing steps. By performing a direct observation of the pre-existing feature using machine vision, the uncertainty of the feature location can be circumvented. In this paper, a two-layer feedback architecture with a vision sensor in the outer loops is used to visually servo the pre-existing feature on the web. Additionally, the feedback controller is augmented with Norm Optimal Iterative Learning Control (NOILC) to improve the position tracking and tension regulation of the web. Simulation and experimental results show the advantages of implementing NOILC in the R2R system.

Original languageEnglish (US)
Title of host publication19th IFAC World Congress IFAC 2014, Proceedings
EditorsXiaohua Xia, Edward Boje
PublisherIFAC Secretariat
Pages7202-7207
Number of pages6
ISBN (Electronic)9783902823625
StatePublished - Jan 1 2014
Event19th IFAC World Congress on International Federation of Automatic Control, IFAC 2014 - Cape Town, South Africa
Duration: Aug 24 2014Aug 29 2014

Publication series

NameIFAC Proceedings Volumes (IFAC-PapersOnline)
Volume19
ISSN (Print)1474-6670

Other

Other19th IFAC World Congress on International Federation of Automatic Control, IFAC 2014
CountrySouth Africa
CityCape Town
Period8/24/148/29/14

Keywords

  • 2 DOF Control
  • Iterative Learning Control
  • Manufacturing System
  • Optimal Control
  • Vision

ASJC Scopus subject areas

  • Control and Systems Engineering

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  • Cite this

    Sutanto, E., & Alleyne, A. G. (2014). Vision based Iterative Learning Control for a roll to roll micro/nano-manufacturing system. In X. Xia, & E. Boje (Eds.), 19th IFAC World Congress IFAC 2014, Proceedings (pp. 7202-7207). (IFAC Proceedings Volumes (IFAC-PapersOnline); Vol. 19). IFAC Secretariat.