Visible emission contours for neon plasmas in silicon microcavity discharge devices: Pressure dependence of spatially resolved fluorescence above the anode plane

Nels P. Ostrom; J. Gary Eden

doi:10.1109/TPS.2005.845289

Visible emission contours for neon plasmas in silicon microcavity discharge devices: Pressure dependence of spatially resolved fluorescence above the anode plane

Nels P. Ostrom
, J. Gary Eden

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Images of the Ne plasma plume residing above the microcavity of a Si inverted square pyramid microdischarge device have been obtained with an optical telescope and a charged-coupled device camera. Viewing the discharge along the device surface show the plume to be approximately hemispherical with a bright core having a width (at the surface) of ∼140 μm for p_Ne = 300 torr. The dependence of the plume contour on pressure is in qualitative agreement with recent computational results (Kushner, 2004).

Original language	English (US)
Pages (from-to)	576-577
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	33
Issue number	2 I
DOIs	https://doi.org/10.1109/TPS.2005.845289
State	Published - Apr 2005

Keywords

Fluorescence
Microcavity plasma
Microdischarge

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

Online availability

10.1109/TPS.2005.845289

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title = "Visible emission contours for neon plasmas in silicon microcavity discharge devices: Pressure dependence of spatially resolved fluorescence above the anode plane",

abstract = "Images of the Ne plasma plume residing above the microcavity of a Si inverted square pyramid microdischarge device have been obtained with an optical telescope and a charged-coupled device camera. Viewing the discharge along the device surface show the plume to be approximately hemispherical with a bright core having a width (at the surface) of ∼140 μm for pNe = 300 torr. The dependence of the plume contour on pressure is in qualitative agreement with recent computational results (Kushner, 2004).",

keywords = "Fluorescence, Microcavity plasma, Microdischarge",

author = "Ostrom, \{Nels P.\} and Eden, \{J. Gary\}",

note = "Manuscript received July 3, 2004; revised December 14, 2004. This work was supported by the U.S. Air Force Office of Scientific Research (H. R. Schloss-berg) under Grant F49620-03-1-0391. The authors are with the Laboratory for Optical Physics and Engineering, Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801 USA (e-mail: [email protected]). Digital Object Identifier 10.1109/TPS.2005.845289",

year = "2005",

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doi = "10.1109/TPS.2005.845289",

language = "English (US)",

volume = "33",

pages = "576--577",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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T1 - Visible emission contours for neon plasmas in silicon microcavity discharge devices

T2 - Pressure dependence of spatially resolved fluorescence above the anode plane

AU - Ostrom, Nels P.

AU - Eden, J. Gary

N1 - Manuscript received July 3, 2004; revised December 14, 2004. This work was supported by the U.S. Air Force Office of Scientific Research (H. R. Schloss-berg) under Grant F49620-03-1-0391. The authors are with the Laboratory for Optical Physics and Engineering, Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801 USA (e-mail: [email protected]). Digital Object Identifier 10.1109/TPS.2005.845289

PY - 2005/4

Y1 - 2005/4

N2 - Images of the Ne plasma plume residing above the microcavity of a Si inverted square pyramid microdischarge device have been obtained with an optical telescope and a charged-coupled device camera. Viewing the discharge along the device surface show the plume to be approximately hemispherical with a bright core having a width (at the surface) of ∼140 μm for pNe = 300 torr. The dependence of the plume contour on pressure is in qualitative agreement with recent computational results (Kushner, 2004).

AB - Images of the Ne plasma plume residing above the microcavity of a Si inverted square pyramid microdischarge device have been obtained with an optical telescope and a charged-coupled device camera. Viewing the discharge along the device surface show the plume to be approximately hemispherical with a bright core having a width (at the surface) of ∼140 μm for pNe = 300 torr. The dependence of the plume contour on pressure is in qualitative agreement with recent computational results (Kushner, 2004).

KW - Fluorescence

KW - Microcavity plasma

KW - Microdischarge

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DO - 10.1109/TPS.2005.845289

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JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

IS - 2 I

ER -

Visible emission contours for neon plasmas in silicon microcavity discharge devices: Pressure dependence of spatially resolved fluorescence above the anode plane

Abstract

Keywords

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