Visible emission contours for neon plasmas in silicon microcavity discharge devices: Pressure dependence of spatially resolved fluorescence above the anode plane

Nels P. Ostrom, J. Gary Eden

Research output: Contribution to journalArticlepeer-review

Abstract

Images of the Ne plasma plume residing above the microcavity of a Si inverted square pyramid microdischarge device have been obtained with an optical telescope and a charged-coupled device camera. Viewing the discharge along the device surface show the plume to be approximately hemispherical with a bright core having a width (at the surface) of ∼140 μm for pNe = 300 torr. The dependence of the plume contour on pressure is in qualitative agreement with recent computational results (Kushner, 2004).

Original languageEnglish (US)
Pages (from-to)576-577
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume33
Issue number2 I
DOIs
StatePublished - Apr 1 2005

Keywords

  • Fluorescence
  • Microcavity plasma
  • Microdischarge

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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