Visible and near-ultraviolet emission characteristics of Ne, Ar, and Ar/N2 excited in silicon microcavity discharge arrays

Nels P. Ostrom, J. Gary Eden

Research output: Contribution to journalArticlepeer-review

Abstract

Atomic and molecular emissions provide a convenient diagnostic of the spatial uniformity of the electrical characteristics of Si microcavity discharge arrays. 10 × 10 arrays of (50 μm)2, inverted pyramidal Si microcavity pixels have been studied with Ne, Ar, and Ar/N2 gas mixtures at pressures up to 800 torr. Nonuniform power loading of pixels in the array, as well as the comparative strength of the electric field within each pixel at the device perimeter, are evident from images of the surface emission from the array.

Original languageEnglish (US)
Pages (from-to)578-579
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume33
Issue number2 I
DOIs
StatePublished - Apr 1 2005

Keywords

  • Arrays
  • Atomic and molecular emission
  • Microdischarges
  • Plasmas

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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