Virtual probe: A statistically optimal framework for minimum-cost silicon characterization of nanoscale integrated circuits

Xin Li, Rob R. Rutenbar, Ronald D. Blanton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we propose a new technique, referred to as virtual probe (VP), to efficiently measure, characterize and monitor both inter-die and spatially-correlated intra-die variations in nanoscale manufacturing process. VP exploits recent breakthroughs in compressed sensing [15]-[17] to accurately predict spatial variations from an exceptionally small set of measurement data, thereby reducing the cost of silicon characterization. By exploring the underlying sparse structure in (spatial) frequency domain, VP achieves substantially lower sampling frequency than the wellknown (spatial) Nyquist rate. In addition, VP is formulated as a linear programming problem and, therefore, can be solved both robustly and efficiently. Our industrial measurement data demonstrate that by testing the delay of just 50 chips on a wafer, VP accurately predicts the delay of the other 219 chips on the same wafer. In this example, VP reduces the estimation error by up to 10× compared to other traditional methods.

Original languageEnglish (US)
Title of host publicationProceedings of the 2009 IEEE/ACM International Conference on Computer-Aided Design - Digest of Technical Papers, ICCAD 2009
Pages433-440
Number of pages8
StatePublished - 2009
Event2009 IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2009 - San Jose, CA, United States
Duration: Nov 2 2009Nov 5 2009

Publication series

NameIEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers, ICCAD
ISSN (Print)1092-3152

Other

Other2009 IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2009
CountryUnited States
CitySan Jose, CA
Period11/2/0911/5/09

Keywords

  • Characterization
  • Integrated circuit
  • Process variation

ASJC Scopus subject areas

  • Software
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

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  • Cite this

    Li, X., Rutenbar, R. R., & Blanton, R. D. (2009). Virtual probe: A statistically optimal framework for minimum-cost silicon characterization of nanoscale integrated circuits. In Proceedings of the 2009 IEEE/ACM International Conference on Computer-Aided Design - Digest of Technical Papers, ICCAD 2009 (pp. 433-440). [5361258] (IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers, ICCAD).