Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems

Ansas M. Kasten, Joshua D. Tice, Antonios V. Giannopoulos, Varun B. Verma, Paul J A Kenis, Kent D Choquette

Research output: Contribution to journalConference article

Abstract

We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 μM of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.

Original languageEnglish (US)
Article number722909
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume7229
DOIs
StatePublished - Apr 6 2009
EventVertical-Cavity Surface-Emitting Lasers XIII - San Jose, CA, United States
Duration: Jan 28 2009Jan 29 2009

Fingerprint

Optical Sensing
Microsystems
Vertical-cavity Surface-emitting Laser (VCSEL)
Surface emitting lasers
Microfluidics
surface emitting lasers
fluidics
cavities
Die
Fluidics
Silicon
Dyes
dyes
Fabrication
fabrication
Coloring Agents
Substrate
silicon
Optofluidics
laser outputs

Keywords

  • Biomedical sensing
  • Microfluidic
  • Opto-fluidic integration
  • VCSEL

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems. / Kasten, Ansas M.; Tice, Joshua D.; Giannopoulos, Antonios V.; Verma, Varun B.; Kenis, Paul J A; Choquette, Kent D.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 7229, 722909, 06.04.2009.

Research output: Contribution to journalConference article

@article{c102c82aa6b94346b6fae9967814a57e,
title = "Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems",
abstract = "We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 μM of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.",
keywords = "Biomedical sensing, Microfluidic, Opto-fluidic integration, VCSEL",
author = "Kasten, {Ansas M.} and Tice, {Joshua D.} and Giannopoulos, {Antonios V.} and Verma, {Varun B.} and Kenis, {Paul J A} and Choquette, {Kent D}",
year = "2009",
month = "4",
day = "6",
doi = "10.1117/12.813407",
language = "English (US)",
volume = "7229",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",

}

TY - JOUR

T1 - Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems

AU - Kasten, Ansas M.

AU - Tice, Joshua D.

AU - Giannopoulos, Antonios V.

AU - Verma, Varun B.

AU - Kenis, Paul J A

AU - Choquette, Kent D

PY - 2009/4/6

Y1 - 2009/4/6

N2 - We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 μM of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.

AB - We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 μM of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.

KW - Biomedical sensing

KW - Microfluidic

KW - Opto-fluidic integration

KW - VCSEL

UR - http://www.scopus.com/inward/record.url?scp=63449120386&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=63449120386&partnerID=8YFLogxK

U2 - 10.1117/12.813407

DO - 10.1117/12.813407

M3 - Conference article

AN - SCOPUS:63449120386

VL - 7229

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

M1 - 722909

ER -