Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems

Ansas M. Kasten, Joshua D. Tice, Antonios V. Giannopoulos, Varun B. Verma, Paul J A Kenis, Kent D Choquette

Research output: Contribution to journalConference articlepeer-review


We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 μM of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.

Original languageEnglish (US)
Article number722909
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2009
EventVertical-Cavity Surface-Emitting Lasers XIII - San Jose, CA, United States
Duration: Jan 28 2009Jan 29 2009


  • Biomedical sensing
  • Microfluidic
  • Opto-fluidic integration

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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