Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems

Ansas M. Kasten; Joshua D. Tice; Antonios V. Giannopoulos; Varun B. Verma; Paul J A Kenis; Kent D Choquette

doi:10.1117/12.813407

Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems

Ansas M. Kasten, Joshua D. Tice, Antonios V. Giannopoulos, Varun B. Verma, Paul J A Kenis, Kent D Choquette

Research output: Contribution to journal › Conference article › peer-review

Abstract

We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 μM of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.

Original language	English (US)
Article number	722909
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7229
DOIs	https://doi.org/10.1117/12.813407
State	Published - 2009
Event	Vertical-Cavity Surface-Emitting Lasers XIII - San Jose, CA, United States Duration: Jan 28 2009 → Jan 29 2009

Keywords

Biomedical sensing
Microfluidic
Opto-fluidic integration
VCSEL

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Online availability

10.1117/12.813407

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title = "Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems",

abstract = "We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 μM of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.",

keywords = "Biomedical sensing, Microfluidic, Opto-fluidic integration, VCSEL",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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AU - Kasten, Ansas M.

AU - Tice, Joshua D.

AU - Giannopoulos, Antonios V.

AU - Verma, Varun B.

AU - Kenis, Paul J A

AU - Choquette, Kent D

PY - 2009

Y1 - 2009

N2 - We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 μM of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.

AB - We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 μM of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.

KW - Biomedical sensing

KW - Microfluidic

KW - Opto-fluidic integration

KW - VCSEL

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Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems

Abstract

Keywords

ASJC Scopus subject areas

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