Vapor Sensing by Means of a ZnO-on-Si Surface Acoustic Wave Resonator

Keyphrases

• Si Surface 100%
• Resonant Frequency 100%
• Vapor Sensing 100%
• Surface Acoustic Wave Resonator 100%
• ZnO Layer 100%
• Parts per Billion 50%
• Surface Acoustic Wave Devices 50%
• Control Element 50%
• Surface Acoustic 50%
• Adsorbed Molecules 50%
• Electrical Energy 50%
• Gas Phase 50%
• Velocity Fluctuation 50%
• Transient Response 50%
• Acoustic Energy 50%
• Wave Velocity 50%
• Resonance Frequency Shift 50%
• Organic Vapors 50%
• Mass Effect 50%
• Acoustic Energy Density 50%
• Frequency Control 50%
• Surface Wave Velocity 50%
• Adsorptive Property 50%
• Polycrystalline ZnO 50%
• Vapor Sensor 50%
• Vapor-air Mixture 50%
• Frequency Counter 50%

Engineering

• Resonator 100%
• Surface Acoustic Wave 100%
• Si Surface 100%
• Resonant Frequency 100%
• Wave Velocity 66%
• Adsorbed Molecule 66%
• Acoustic Energy 66%
• Polycrystalline 33%
• Surface Acoustic Wave Device 33%
• Piezoelectric 33%
• Sensitive Detector 33%
• Frequency Shift 33%
• Control Element 33%
• Gas-Phase 33%
• Electrical Energy 33%
• Transient Analysis 33%
• Velocity Perturbation 33%
• Air Mixture 33%
• Oscillator 33%
• Flux Density 33%

Material Science

• Resonator 100%
• ZnO 100%
• Surface (Surface Science) 75%
• Energy Density 25%
• Piezoelectricity 25%
• Surface Acoustic Wave Device 25%
• Oscillator 25%