Vapor-Liquid-Solid Growth of Semiconductor Nanowires

Joan M. Redwing, Xin Miao, Xiuling Li

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

The vapor-liquid-solid (VLS) growth technique has advanced significantly over the past several decades. This technique has progressed from an interesting method for whisker growth to a viable approach for semiconductor nanowire fabrication for applications in nanoscale electronics, optoelectronics, sensing, and energy conversion. This chapter reviews fundamental aspects of VLS growth with an emphasis on synthesis within a chemical vapor deposition environment. The first half of the chapter is focused on Si nanowire growth, and reviews diameter-dependent growth rate and orientation effects, metal catalysts, intentional doping, and the growth of Si1-xGex nanowires and axial heterostructures. The second half is devoted to a review of III-V nanowire growth with an emphasis on GaAs and InAs nanowires. The growth of vertical and planar III-V nanowires is initially discussed, followed by doping and the synthesis of nanowire axial and radial (core-shell) heterostructures.

Original languageEnglish (US)
Title of host publicationHandbook of Crystal Growth
Subtitle of host publicationThin Films and Epitaxy: Second Edition
PublisherElsevier Inc.
Pages399-439
Number of pages41
Volume3
ISBN (Electronic)9780444633057
ISBN (Print)9780444633040
DOIs
StatePublished - Jan 1 2015

Keywords

  • Core-shell nanowires
  • Doping of nanowires
  • III-V Nanowires
  • Nanowire axial heterostructures
  • Nanowire growth direction
  • Si nanowires
  • SiGe nanowires
  • Vapor-liquid-solid growth

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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  • Cite this

    Redwing, J. M., Miao, X., & Li, X. (2015). Vapor-Liquid-Solid Growth of Semiconductor Nanowires. In Handbook of Crystal Growth: Thin Films and Epitaxy: Second Edition (Vol. 3, pp. 399-439). Elsevier Inc.. https://doi.org/10.1016/B978-0-444-63304-0.00009-3