TY - JOUR
T1 - Utilizing intentional internal resonance to achieve multi-harmonic atomic force microscopy
AU - Jeong, Bongwon
AU - Pettit, Chris
AU - Dharmasena, Sajith
AU - Keum, Hohyun
AU - Lee, Joohyung
AU - Kim, Jungkyu
AU - Kim, Seok
AU - McFarland, D. Michael
AU - Bergman, Lawrence A.
AU - Vakakis, Alexander F.
AU - Cho, Hanna
N1 - Funding Information:
This work was financially supported in part by National Science Foundation Grant CMMI-1619801 and CMMI-1463558 and was carried out in part at the Frederick Seitz Materials Research Laboratory Central Research Facilities, University of Illinois.
Publisher Copyright:
© 2016 IOP Publishing Ltd.
PY - 2016/2/17
Y1 - 2016/2/17
N2 - During dynamic atomic force microscopy (AFM), the deflection of a scanning cantilever generates multiple frequency terms due to the nonlinear nature of AFM tip-sample interactions. Even though each frequency term is reasonably expected to encode information about the sample, only the fundamental frequency term is typically decoded to provide topographic mapping of the measured surface. One of main reasons for discarding higher harmonic signals is their low signal-to-noise ratio. Here, we introduce a new design concept for multi-harmonic AFM, exploiting intentional nonlinear internal resonance for the enhancement of higher harmonics. The nonlinear internal resonance, triggered by the non-smooth tip-sample dynamic interactions, results in nonlinear energy transfers from the directly excited fundamental bending mode to the higher-frequency mode and, hence, enhancement of the higher harmonic of the measured response. It is verified through detailed theoretical and experimental study that this AFM design can robustly incorporate the required internal resonance and enable high-frequency AFM measurements. Measurements on an inhomogeneous polymer specimen demonstrate the efficacy of the proposed design, namely that the higher harmonic of the measured response is capable of enhanced simultaneous topography imaging and compositional mapping, exhibiting less crosstalk with an abrupt height change.
AB - During dynamic atomic force microscopy (AFM), the deflection of a scanning cantilever generates multiple frequency terms due to the nonlinear nature of AFM tip-sample interactions. Even though each frequency term is reasonably expected to encode information about the sample, only the fundamental frequency term is typically decoded to provide topographic mapping of the measured surface. One of main reasons for discarding higher harmonic signals is their low signal-to-noise ratio. Here, we introduce a new design concept for multi-harmonic AFM, exploiting intentional nonlinear internal resonance for the enhancement of higher harmonics. The nonlinear internal resonance, triggered by the non-smooth tip-sample dynamic interactions, results in nonlinear energy transfers from the directly excited fundamental bending mode to the higher-frequency mode and, hence, enhancement of the higher harmonic of the measured response. It is verified through detailed theoretical and experimental study that this AFM design can robustly incorporate the required internal resonance and enable high-frequency AFM measurements. Measurements on an inhomogeneous polymer specimen demonstrate the efficacy of the proposed design, namely that the higher harmonic of the measured response is capable of enhanced simultaneous topography imaging and compositional mapping, exhibiting less crosstalk with an abrupt height change.
KW - internal resonance
KW - micromechanical resonator
KW - multi-harmonic atomic force microscopy
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U2 - 10.1088/0957-4484/27/12/125501
DO - 10.1088/0957-4484/27/12/125501
M3 - Article
C2 - 26883303
AN - SCOPUS:84959244769
SN - 0957-4484
VL - 27
JO - Nanotechnology
JF - Nanotechnology
IS - 12
M1 - 125501
ER -