Silicon micromechanical resonators have been designed to have a quality factor (Q) that is a strong function of temperature. This is an ideal sensor for the temperature of the resonator-it is instantaneous, consumes no power, and indicates the temperature of the resonator structure with high sensitivity. The authors present a practical implementation of an oscillator system using these resonators with a temperature resolution of better than 0.002 °C. The Q (T) signal is uniquely suited for implementing feedback control of the resonator temperature, thereby stabilizing the frequency silicon micromechanical resonators and enabling their use in high-stability frequency reference applications.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)