Using the temperature dependence of resonator quality factor as a thermometer

M. A. Hopcroft; B. Kim; S. Chandorkar; R. Melamud; M. Agarwal; C. M. Jha; G. Bahl; J. Salvia; H. Mehta; H. K. Lee; R. N. Candler; T. W. Kenny

doi:10.1063/1.2753758

Using the temperature dependence of resonator quality factor as a thermometer

M. A. Hopcroft, B. Kim, S. Chandorkar, R. Melamud, M. Agarwal, C. M. Jha, G. Bahl, J. Salvia, H. Mehta, H. K. Lee, R. N. Candler, T. W. Kenny

Research output: Contribution to journal › Article › peer-review

Abstract

Silicon micromechanical resonators have been designed to have a quality factor (Q) that is a strong function of temperature. This is an ideal sensor for the temperature of the resonator-it is instantaneous, consumes no power, and indicates the temperature of the resonator structure with high sensitivity. The authors present a practical implementation of an oscillator system using these resonators with a temperature resolution of better than 0.002 °C. The Q (T) signal is uniquely suited for implementing feedback control of the resonator temperature, thereby stabilizing the frequency silicon micromechanical resonators and enabling their use in high-stability frequency reference applications.

Original language	English (US)
Article number	013505
Journal	Applied Physics Letters
Volume	91
Issue number	1
DOIs	https://doi.org/10.1063/1.2753758
State	Published - 2007
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2753758

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@article{b092ad3317994b93995b22f43b0d60e9,

title = "Using the temperature dependence of resonator quality factor as a thermometer",

abstract = "Silicon micromechanical resonators have been designed to have a quality factor (Q) that is a strong function of temperature. This is an ideal sensor for the temperature of the resonator-it is instantaneous, consumes no power, and indicates the temperature of the resonator structure with high sensitivity. The authors present a practical implementation of an oscillator system using these resonators with a temperature resolution of better than 0.002 °C. The Q (T) signal is uniquely suited for implementing feedback control of the resonator temperature, thereby stabilizing the frequency silicon micromechanical resonators and enabling their use in high-stability frequency reference applications.",

author = "Hopcroft, {M. A.} and B. Kim and S. Chandorkar and R. Melamud and M. Agarwal and Jha, {C. M.} and G. Bahl and J. Salvia and H. Mehta and Lee, {H. K.} and Candler, {R. N.} and Kenny, {T. W.}",

note = "Funding Information: This work was supported by DARPA HERMIT (ONR N66001-03-1-8942), the National Nanofabrication Users Network facilities funded by the National Science Foundation under Award No. ECS-9731294, the National Science Foundation Instrumentation for Materials Research Program (DMR 9504099), and the Robert Bosch Corporation. The authors would like to acknowledge strong support and advice for this work from G. Yama, A. Partridge, M. Lutz, C. Nguyen, J. Vig, B. Murmann, R. Howe, and K. Goodson.",

year = "2007",

doi = "10.1063/1.2753758",

language = "English (US)",

volume = "91",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "1",

}

TY - JOUR

T1 - Using the temperature dependence of resonator quality factor as a thermometer

AU - Hopcroft, M. A.

AU - Kim, B.

AU - Chandorkar, S.

AU - Melamud, R.

AU - Agarwal, M.

AU - Jha, C. M.

AU - Bahl, G.

AU - Salvia, J.

AU - Mehta, H.

AU - Lee, H. K.

AU - Candler, R. N.

AU - Kenny, T. W.

N1 - Funding Information: This work was supported by DARPA HERMIT (ONR N66001-03-1-8942), the National Nanofabrication Users Network facilities funded by the National Science Foundation under Award No. ECS-9731294, the National Science Foundation Instrumentation for Materials Research Program (DMR 9504099), and the Robert Bosch Corporation. The authors would like to acknowledge strong support and advice for this work from G. Yama, A. Partridge, M. Lutz, C. Nguyen, J. Vig, B. Murmann, R. Howe, and K. Goodson.

PY - 2007

Y1 - 2007

N2 - Silicon micromechanical resonators have been designed to have a quality factor (Q) that is a strong function of temperature. This is an ideal sensor for the temperature of the resonator-it is instantaneous, consumes no power, and indicates the temperature of the resonator structure with high sensitivity. The authors present a practical implementation of an oscillator system using these resonators with a temperature resolution of better than 0.002 °C. The Q (T) signal is uniquely suited for implementing feedback control of the resonator temperature, thereby stabilizing the frequency silicon micromechanical resonators and enabling their use in high-stability frequency reference applications.

AB - Silicon micromechanical resonators have been designed to have a quality factor (Q) that is a strong function of temperature. This is an ideal sensor for the temperature of the resonator-it is instantaneous, consumes no power, and indicates the temperature of the resonator structure with high sensitivity. The authors present a practical implementation of an oscillator system using these resonators with a temperature resolution of better than 0.002 °C. The Q (T) signal is uniquely suited for implementing feedback control of the resonator temperature, thereby stabilizing the frequency silicon micromechanical resonators and enabling their use in high-stability frequency reference applications.

UR - http://www.scopus.com/inward/record.url?scp=36049006848&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=36049006848&partnerID=8YFLogxK

U2 - 10.1063/1.2753758

DO - 10.1063/1.2753758

M3 - Article

AN - SCOPUS:36049006848

SN - 0003-6951

VL - 91

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 1

M1 - 013505

ER -

Using the temperature dependence of resonator quality factor as a thermometer

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