Abstract
One of the biggest hurdles in microLED-technology is the efficiency degradation with shrinking pixel-size, due to etching damage. We present the scaling of µLED from 45 to 5 µm by MacEtch, with near size-independent EQE.
Original language | English (US) |
---|---|
State | Published - 2024 |
Externally published | Yes |
Event | CLEO: Applications and Technology in CLEO 2024, CLEO: A and T 2024 - Part of Conference on Lasers and Electro-Optics - Charlotte, United States Duration: May 5 2024 → May 10 2024 |
Conference
Conference | CLEO: Applications and Technology in CLEO 2024, CLEO: A and T 2024 - Part of Conference on Lasers and Electro-Optics |
---|---|
Country/Territory | United States |
City | Charlotte |
Period | 5/5/24 → 5/10/24 |
ASJC Scopus subject areas
- General Computer Science
- Space and Planetary Science
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Atomic and Molecular Physics, and Optics