Uniform selectively oxidized 2-dimensional VCSEL arrays for VLSI photonics

The ability to fabricate high density 2-dimensional arrays is an inherent advantage of vertical cavity surface emitting lasers (VCSEL). VCSEL arrays integrated monolithically or integrated using a hybrid technology to microelectronics will have the potential to achieve `VLSI photonics,' considered the next generation of photoelectronics. Suitable VCSEL arrays will require high uniformity and low input power in order to achieve an appropriate element density with manageable thermal load, but will only need modest output power. An 8×8 individually addressable array of selectively oxidized 1.06 μm VCSEL is described, and the preliminary arrays that have promising characteristics for VLSI photonic applications are shown.