Uniform selectively oxidized 2-dimensional VCSEL arrays for VLSI photonics

Kent D. Choquette, H. Q. Hou, K. M. Geib, B. E. Hammons

Research output: Contribution to journalConference articlepeer-review


The ability to fabricate high density 2-dimensional arrays is an inherent advantage of vertical cavity surface emitting lasers (VCSEL). VCSEL arrays integrated monolithically or integrated using a hybrid technology to microelectronics will have the potential to achieve `VLSI photonics,' considered the next generation of photoelectronics. Suitable VCSEL arrays will require high uniformity and low input power in order to achieve an appropriate element density with manageable thermal load, but will only need modest output power. An 8×8 individually addressable array of selectively oxidized 1.06 μm VCSEL is described, and the preliminary arrays that have promising characteristics for VLSI photonic applications are shown.

Original languageEnglish (US)
Pages (from-to)417-418
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
StatePublished - 1997
Externally publishedYes
EventProceedings of the 1997 10th IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS. Part 2 (of 2) - San Francisco, CA, USA
Duration: Nov 10 1997Nov 13 1997

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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