Uniform and high power selectively oxidized 8×8 VCSEL array

Keyphrases

• High Power 100%
• Uniform Power 100%
• Vertical Cavity Surface Emitting Laser Array 100%
• Wafer 50%
• Reactor 50%
• Individually Addressable 50%
• Metal Organic Vapor Phase Epitaxy (MOVPE) 50%
• High Growth 50%
• Vertical-cavity Surface-emitting Laser (VCSEL) 50%
• CW Operation 50%
• Multiple Elements 50%
• Thermal Issues 50%
• Growth Uniformity 50%

Engineering

• Emitting Laser 100%
• Cavity Surface 100%
• Dimensional Array 33%