Abstract
The uniform characteristics of an 8×8 individually addressable high power 850 nm vertical cavity surface emitting laser (VCSEL) array are presented. Both growth and fabrication are considered in achieving 2-dimensionally array uniformity. The VCSEL wafer is grown by metalorganic vapor phase epitaxy using an EMCORE reactor designed and calibrated for high growth uniformity. Thermal issues in 2-dimensional arrays are also important for simultaneous cw operation of multiple elements.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 11-12 |
| Number of pages | 2 |
| Journal | LEOS Summer Topical Meeting |
| State | Published - 1997 |
| Externally published | Yes |
| Event | Proceedings of the 1997 LEOS Summer Topical Meeting - Montreal, Can Duration: Aug 11 1997 → Aug 15 1997 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering
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