Uniform and high power selectively oxidized 8×8 VCSEL array

Kent D. Choquette, H. Q. Hou, K. M. Geib, B. E. Hammons

Research output: Contribution to journalConference articlepeer-review


The uniform characteristics of an 8×8 individually addressable high power 850 nm vertical cavity surface emitting laser (VCSEL) array are presented. Both growth and fabrication are considered in achieving 2-dimensionally array uniformity. The VCSEL wafer is grown by metalorganic vapor phase epitaxy using an EMCORE reactor designed and calibrated for high growth uniformity. Thermal issues in 2-dimensional arrays are also important for simultaneous cw operation of multiple elements.

Original languageEnglish (US)
Pages (from-to)11-12
Number of pages2
JournalLEOS Summer Topical Meeting
StatePublished - 1997
Externally publishedYes
EventProceedings of the 1997 LEOS Summer Topical Meeting - Montreal, Can
Duration: Aug 11 1997Aug 15 1997

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


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