Understanding Substrate Loss in Microwave Acoustic Resonators

Liuqing Gao, Yansong Yang, Songbin Gong

Research output: Contribution to journalConference articlepeer-review


This work studies the influence of substrate loss on the performance of acoustic resonators and characterizes the effective substrate resistivity of LiNbO3 thin-film on a high-resistivity Si (HR-Si) wafer. Coplanar waveguides (CPWs) are utilized to extract the effective substrate resistivity of LiNbO3 film on Si over a frequency range from 1 to 40 GHz with two different film thicknesses: 400 nm and 1.6m. The effective resistivities of released and unreleased CPW structures are experimentally extracted and analyzed to show that a suspended structure on a thinner LiNbO3 film has less substrate loss due to a smaller electric field filling factor in the film. As a result, the removal of Si wafer by a release process brings more substrate loss reduction for a thin film than that on a thick film.

Original languageEnglish (US)
JournalIEEE International Ultrasonics Symposium, IUS
StatePublished - 2021
Event2021 IEEE International Ultrasonics Symposium, IUS 2021 - Virtual, Online, China
Duration: Sep 11 2011Sep 16 2011


  • Microelectromechanical systems
  • coplanar waveguide
  • effective resistivity
  • millimeter-wave devices
  • piezoelectric device

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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