Abstract
This work studies the influence of substrate loss on the performance of acoustic resonators and characterizes the effective substrate resistivity of LiNbO3 thin-film on a high-resistivity Si (HR-Si) wafer. Coplanar waveguides (CPWs) are utilized to extract the effective substrate resistivity of LiNbO3 film on Si over a frequency range from 1 to 40 GHz with two different film thicknesses: 400 nm and 1.6m. The effective resistivities of released and unreleased CPW structures are experimentally extracted and analyzed to show that a suspended structure on a thinner LiNbO3 film has less substrate loss due to a smaller electric field filling factor in the film. As a result, the removal of Si wafer by a release process brings more substrate loss reduction for a thin film than that on a thick film.
Original language | English (US) |
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Journal | IEEE International Ultrasonics Symposium, IUS |
DOIs | |
State | Published - 2021 |
Event | 2021 IEEE International Ultrasonics Symposium, IUS 2021 - Virtual, Online, China Duration: Sep 11 2011 → Sep 16 2011 |
Keywords
- Microelectromechanical systems
- coplanar waveguide
- effective resistivity
- millimeter-wave devices
- piezoelectric device
ASJC Scopus subject areas
- Acoustics and Ultrasonics