Ultrathin Silicon Nanomembrane in a Tubular Geometry for Enhanced Photodetection

Changhao Xu, Ruobing Pan, Qinglei Guo, Xiang Wu, Gongjin Li, Gaoshan Huang, Zhenghua An, Xiuling Li, Yongfeng Mei

Research output: Contribution to journalArticle

Abstract

Advanced 3D mesostructures have prominent applications in flexible electronics, photonics, mechanics, and biomedicine. Here, 3D tubular silicon photodetectors are demonstrated by self-rolling ultrathin silicon nanomembranes with enhanced broadband photodetection and responsivity. Strain distributions within the unique circular structures are investigated with micro-Raman spectroscopy, while the tensile strain of the rolled-up microtubes can be controlled with the tube diameter by modifying the membrane thickness and etching parameters during the rolled-up process. The tubular photodetector exhibits increased photocurrent and suppressed dark current compared with planar devices over a wide incident angle. This study provides a novel approach to construct high-performance omnidirectional Si-based photodetectors and offers promising prospects for design and manufacture of complex 3D optoelectronic devices.

Original languageEnglish (US)
Article number1900823
JournalAdvanced Optical Materials
Volume7
Issue number21
DOIs
StatePublished - Nov 1 2019

Fingerprint

Silicon
Photodetectors
photometers
Geometry
silicon
geometry
Flexible electronics
strain distribution
Tensile strain
Dark currents
optoelectronic devices
dark current
Photocurrents
Optoelectronic devices
Photonics
photocurrents
Raman spectroscopy
Etching
Mechanics
etching

Keywords

  • photodetector
  • rolled-up nanotechnology
  • silicon nanomembrane

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

Cite this

Ultrathin Silicon Nanomembrane in a Tubular Geometry for Enhanced Photodetection. / Xu, Changhao; Pan, Ruobing; Guo, Qinglei; Wu, Xiang; Li, Gongjin; Huang, Gaoshan; An, Zhenghua; Li, Xiuling; Mei, Yongfeng.

In: Advanced Optical Materials, Vol. 7, No. 21, 1900823, 01.11.2019.

Research output: Contribution to journalArticle

Xu, Changhao ; Pan, Ruobing ; Guo, Qinglei ; Wu, Xiang ; Li, Gongjin ; Huang, Gaoshan ; An, Zhenghua ; Li, Xiuling ; Mei, Yongfeng. / Ultrathin Silicon Nanomembrane in a Tubular Geometry for Enhanced Photodetection. In: Advanced Optical Materials. 2019 ; Vol. 7, No. 21.
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