Abstract
Advanced 3D mesostructures have prominent applications in flexible electronics, photonics, mechanics, and biomedicine. Here, 3D tubular silicon photodetectors are demonstrated by self-rolling ultrathin silicon nanomembranes with enhanced broadband photodetection and responsivity. Strain distributions within the unique circular structures are investigated with micro-Raman spectroscopy, while the tensile strain of the rolled-up microtubes can be controlled with the tube diameter by modifying the membrane thickness and etching parameters during the rolled-up process. The tubular photodetector exhibits increased photocurrent and suppressed dark current compared with planar devices over a wide incident angle. This study provides a novel approach to construct high-performance omnidirectional Si-based photodetectors and offers promising prospects for design and manufacture of complex 3D optoelectronic devices.
Original language | English (US) |
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Article number | 1900823 |
Journal | Advanced Optical Materials |
Volume | 7 |
Issue number | 21 |
DOIs | |
State | Published - Nov 1 2019 |
Keywords
- photodetector
- rolled-up nanotechnology
- silicon nanomembrane
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics