TY - JOUR
T1 - Ultrathin Silicon Nanomembrane in a Tubular Geometry for Enhanced Photodetection
AU - Xu, Changhao
AU - Pan, Ruobing
AU - Guo, Qinglei
AU - Wu, Xiang
AU - Li, Gongjin
AU - Huang, Gaoshan
AU - An, Zhenghua
AU - Li, Xiuling
AU - Mei, Yongfeng
PY - 2019/11/1
Y1 - 2019/11/1
N2 - Advanced 3D mesostructures have prominent applications in flexible electronics, photonics, mechanics, and biomedicine. Here, 3D tubular silicon photodetectors are demonstrated by self-rolling ultrathin silicon nanomembranes with enhanced broadband photodetection and responsivity. Strain distributions within the unique circular structures are investigated with micro-Raman spectroscopy, while the tensile strain of the rolled-up microtubes can be controlled with the tube diameter by modifying the membrane thickness and etching parameters during the rolled-up process. The tubular photodetector exhibits increased photocurrent and suppressed dark current compared with planar devices over a wide incident angle. This study provides a novel approach to construct high-performance omnidirectional Si-based photodetectors and offers promising prospects for design and manufacture of complex 3D optoelectronic devices.
AB - Advanced 3D mesostructures have prominent applications in flexible electronics, photonics, mechanics, and biomedicine. Here, 3D tubular silicon photodetectors are demonstrated by self-rolling ultrathin silicon nanomembranes with enhanced broadband photodetection and responsivity. Strain distributions within the unique circular structures are investigated with micro-Raman spectroscopy, while the tensile strain of the rolled-up microtubes can be controlled with the tube diameter by modifying the membrane thickness and etching parameters during the rolled-up process. The tubular photodetector exhibits increased photocurrent and suppressed dark current compared with planar devices over a wide incident angle. This study provides a novel approach to construct high-performance omnidirectional Si-based photodetectors and offers promising prospects for design and manufacture of complex 3D optoelectronic devices.
KW - photodetector
KW - rolled-up nanotechnology
KW - silicon nanomembrane
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U2 - 10.1002/adom.201900823
DO - 10.1002/adom.201900823
M3 - Article
AN - SCOPUS:85070716545
VL - 7
JO - Advanced Optical Materials
JF - Advanced Optical Materials
SN - 2195-1071
IS - 21
M1 - 1900823
ER -