Ultrathin oxide films on semiconductors

Walter G Klemperer (Inventor), Erik A Mikalsen (Inventor), David A Payne (Inventor), Jason Lee (Inventor)

Research output: Patent


A method of making a semiconductor structure includes contacting a surface of a semiconductor with a liquid including Zr4(OPrn)16 to form a modified surface, activating the modified surface, and repeating the contacting and activating to form a layer of zirconia on the semiconductor surface.
Original languageEnglish (US)
U.S. patent number6794315
StatePublished - Sep 21 2004


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