Ultrananocrystalline diamond tip integrated onto a heated atomic force microscope cantilever

Hoe Joon Kim, Nicolaie Moldovan, Jonathan R. Felts, Suhas Somnath, Zhenting Dai, Tevis D.B. Jacobs, Robert W. Carpick, John A. Carlisle, William P. King

Research output: Contribution to journalArticlepeer-review

Abstract

We report a wear-resistant ultrananocrystalline (UNCD) diamond tip integrated onto a heated atomic force microscope (AFM) cantilever and UNCD tips integrated into arrays of heated AFM cantilevers. The UNCD tips are batch-fabricated and have apex radii of approximately 10 nm and heights up to 7 μm. The solid-state heater can reach temperatures above 600 °C and is also a resistive temperature sensor. The tips were shown to be wear resistant throughout 1.2 m of scanning on a single-crystal silicon grating at a force of 200 nN and a speed of 10 μm s-1. Under the same conditions, a silicon tip was completely blunted. We demonstrate the use of these heated cantilevers for thermal imaging in both contact mode and intermittent contact mode, with a vertical imaging resolution of 1.9 nm. The potential application to nanolithography was also demonstrated, as the tip wrote hundreds of polyethylene nanostructures.

Original languageEnglish (US)
Article number495302
JournalNanotechnology
Volume23
Issue number49
DOIs
StatePublished - Dec 14 2012

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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