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Keyphrases
Ultra-high Vacuum
100%
Silicon Surface
100%
Nanoimprint Lithography
100%
Scanning Tunneling Microscope
100%
Vibrational Heating
66%
Electron Beam
33%
High Energy
33%
Desorption
33%
H-surfaces
33%
Hydrogen Desorption
33%
Nanofabrication
33%
Selective Oxidation
33%
Heating Regime
33%
Desorbed
33%
Feedback Control
33%
Selective Removal
33%
Atomic Hydrogen
33%
Low Bias
33%
Chemical Treatment
33%
Multiple Excitations
33%
Heating Mechanism
33%
Current Dependence
33%
Strong Current
33%
Nitrogen Incorporation
33%
Hydrogen-terminated Silicon
33%
Background Conditions
33%
Electron Beam Resist
33%
Electron-stimulated Desorption
33%
Physics
Ultrahigh Vacuum
100%
Scanning Tunneling Microscope
100%
Chemistry
100%
Hydrogen
100%
Desorption
50%
Linewidth
16%
Chemical Treatment
16%
Feedback Control
16%
Electron Beam
16%
Atomic Hydrogen
16%
Nitrogen
16%
Nano-Fabrication
16%
Engineering
Silicon Surface
100%
Scanning Tunneling Microscope
100%
Nanolithography
100%
Hydrogen
100%
Atomic Hydrogen
16%
Chemical Treatment
16%
Nano-Fabrication
16%
Feedback Control
16%
Monolayers
16%
Nitrogen
16%
Material Science
Silicon
100%
Hydrogen
100%
Desorption
42%
Monolayers
14%
Linewidth
14%
Selective Oxidation
14%