@inproceedings{a2c9502f1cad4917ba7dd53817b06174,
title = "Ultrahigh-Q silica-ALN hybrid disk optomechanical modulator",
abstract = "We present a hybrid silica (SiO2) and aluminum nitride (AlN) optomechanical disk resonator capable of efficient optical modulation over a wide range of wavelengths. Light from a waveguide is coupled to modes of the high-Q wedge-disk optical resonator while the AlN piezoelectric layer actuates mechanical vibrations in response to an RF stimulus, resulting in light modulation via dispersive and dissipative coupling. We experimentally demonstrate modulation at both 1550 nm and 780 nm wavelengths.",
author = "Sohn, {Donggyu B.} and Kim, {Jun Hwan} and Gaurav Bahl",
year = "2017",
month = feb,
day = "23",
doi = "10.1109/MEMSYS.2017.7863401",
language = "English (US)",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "301--303",
booktitle = "2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017",
address = "United States",
note = "30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",
}