Ultrahigh-Q silica-ALN hybrid disk optomechanical modulator

Donggyu B. Sohn, Jun Hwan Kim, Gaurav Bahl

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a hybrid silica (SiO2) and aluminum nitride (AlN) optomechanical disk resonator capable of efficient optical modulation over a wide range of wavelengths. Light from a waveguide is coupled to modes of the high-Q wedge-disk optical resonator while the AlN piezoelectric layer actuates mechanical vibrations in response to an RF stimulus, resulting in light modulation via dispersive and dissipative coupling. We experimentally demonstrate modulation at both 1550 nm and 780 nm wavelengths.

Original languageEnglish (US)
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages301-303
Number of pages3
ISBN (Electronic)9781509050789
DOIs
StatePublished - Feb 23 2017
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: Jan 22 2017Jan 26 2017

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period1/22/171/26/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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