Ultrahigh hardness and high electrical resistivity in nano-twinned, nanocrystalline high-entropy alloy films

Wenyi Huo, Xiaodong Liu, Shuyong Tan, Feng Fang, Zonghan Xie, Jianku Shang, Jianqing Jiang

Research output: Contribution to journalArticlepeer-review

Abstract

Nano-twinned, nanocrystalline CoCrFeNi high-entropy alloy films were produced by magnetron sputtering. The films exhibit a high hardness of 8.5 GPa, the elastic modulus of 161.9 GPa and the resistivity as high as 135.1 μΩ·cm. The outstanding mechanical properties were found to result from the resistance of deformation created by nanocrystalline grains and nano-twins, while the electrical resistivity was attributed to the strong blockage effect induced by grain boundaries and lattice distortions. The results lay a solid foundation for the development of advanced films with structural and functional properties combined in micro-/nano-electronic devices.

Original languageEnglish (US)
Pages (from-to)222-225
Number of pages4
JournalApplied Surface Science
Volume439
DOIs
StatePublished - May 1 2018

Keywords

  • High-entropy alloy film
  • Mechanical properties
  • Nano-twin
  • Nanocrystalline
  • Resistivity

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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