Ultra-Tuning of nonlinear drumhead MEMS resonators by Electro-Thermoelastic buckling

Keyphrases

• Resonator 100%
• Micro-electro-mechanical Systems 100%
• Drumhead 100%
• Thermoelastic Buckling 100%
• Tunability 57%
• Reduced Order Model 57%
• Nonlinear Response 28%
• Electrostatic Force 28%
• Natural Frequency 28%
• Signal Manipulation 28%
• Critical Buckling 28%
• Waveguide 14%
• Precision Control 14%
• Fabrication Methods 14%
• On chip 14%
• Linear Response 14%
• Nonlinearity 14%
• Thermal Expansion 14%
• Physics-based 14%
• Nonlinear Dynamics 14%
• Residual Stress 14%
• Strongly Nonlinear 14%
• Precision Design 14%
• Dynamic Effects 14%
• Bending Mode 14%
• Internal Stress 14%
• Frequency Tuning 14%
• Error Response 14%
• Extended Bandwidth 14%
• Acoustic Devices 14%
• One-dimensional Physics 14%
• Buckling Point 14%

Engineering

• Buckling 100%
• Resonator 100%
• Micro-Electro-Mechanical System 100%
• Reduced Order Model 57%
• Electrostatics 28%
• Nonlinear Response 28%
• Natural Frequency 28%
• Critical Buckling 28%
• One Dimensional 14%
• Linear Response 14%
• Residual Stress 14%
• Non-Linear Dynamic 14%
• Filtration 14%
• Nonlinearity 14%
• Waveguide 14%
• Internal Stress 14%
• Dynamic Effect 14%

Material Science

• Microelectromechanical System 100%
• Resonator 100%
• Thermal Expansion 14%
• Residual Stress 14%
• Waveguide 14%
• Acoustic Device 14%