@inproceedings{f73de3c003f240f1865318899a9c2ce6,
title = "Ultra-S table Mems Clock with 53 Parts-Per-Trillion Fractional Frequency Stability at 8 Hours",
abstract = "We demonstrate a MEMS-enabled clock that sets a new record 53 parts-per-trillion (ppt) fractional frequency stability at 8 hours averaging time, and stays below 100 ppt up to 12 hours. This is achieved using a dual-mode temperature stabilization approach along with a TCXO-inspired compensation scheme that corrects for residual errors in the frequency tracking system. These results represent more than 40x improvement from the previous record [1].",
keywords = "Lam{\'e} Mode Resonators, MEMS Oscillators, Ultra-s table MEMS Clocks",
author = "Jintark Kim and Jie Yan and Rakibul Islam and Jiheng Jing and Jiawei Yang and Gabrielle Vukasin and Ryan Kwon and Saurabh Saxena and Kenny, {Thomas W.} and Hanumolu, {Pavan K.} and Gaurav Bahl",
note = "The authors acknowledge funding support from the DARPA H6 program under cooperative agreement HR0011-23-2-0004.; 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 ; Conference date: 19-01-2025 Through 23-01-2025",
year = "2025",
doi = "10.1109/MEMS61431.2025.10918176",
language = "English (US)",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "205--208",
booktitle = "2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025",
address = "United States",
}