Skip to main navigation Skip to search Skip to main content

Ultra-dense hydrogen silsesquioxane (HSQ) structures on thin silicon nitride membranes

  • Sookyung Choi
  • , Minjun Yan
  • , Liang Wang
  • , Ilesanmi Adesida

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Ultra-dense hydrogen silsesquioxane (HSQ) structures on thin silicon nitride membranes'. Together they form a unique fingerprint.
Sort by

Keyphrases

Engineering

Material Science