Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator

William M.J. Green, Michael J. Rooks, Lidija Sekaric, Yurii A. Vlasov

Research output: Contribution to journalArticlepeer-review


Silicon p+-i-n+ diode Mach-Zehnder electrooptic modulators having an ultra-compact length of 100 to 200 μm are presented. These devices exhibit high modulation efficiency, with a Vπ-L figure of merit of 0.36 V-mm. Optical modulation at data rates up to 10 Gb/s is demonstrated with low RF power consumption of only 5 pJ/bit.

Original languageEnglish (US)
Pages (from-to)17106-17113
Number of pages8
JournalOptics Express
Issue number25
StatePublished - Dec 12 2007
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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