@inproceedings{e885956309064e41b9442155a10267e2,
title = "Type-ii dhbts microwave characterization and metallization issues",
abstract = "A process issue of sub-micron heterojunction bipolar transistors fabrication is described. The metal short occurred during metallization of emitter contact and succeeding wet etch is a major failure mechanism. We present the designs of experiment to identify and solve the problem. The microwave and DC performance of sub-micron Type-II DHBTs is demonstrated.",
keywords = "Electron beam lithography, Heterojunction bipolar transistor, Indium phosphide",
author = "Cheng, {Kuang Yu} and Milton Feng",
year = "2011",
language = "English (US)",
isbn = "1893580172",
series = "2011 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2011",
booktitle = "2011 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2011",
note = "2011 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2011 ; Conference date: 16-05-2011 Through 19-05-2011",
}