Cylindrical microcavity plasma devices with diameters (D) in the 100-300 μm range and a dielectric barrier structure similar to that described by Park [J. Appl. Phys. 99, 026107 (2006)] for Al Al2 O3 devices have been investigated numerically. A two-dimensional fluid simulation of microplasmas in Ne/7% Xe gas mixtures with pD values (where p is the total gas pressure) in the 3-9 Torr cm interval yields the temporal history of the spatially resolved electron and ion number densities in response to a 250 kHz bipolar excitation wave form. Calculations show two distinct regions of plasma development, along the microcavity axis and near the wall, each of which dominates the plasma characteristics in separate pD regions. For low pD values (<4 Torr cm), the negative glow produced at the cavity wall extends to the microcavity axis which, in combination with the strong axial electric field, produces an intense glow discharge on axis. For 4pD6 Torr cm, a weakened axial discharge is observed early in the life of the plasma but the radial variation of the electron density flattens. Further increases in the gas pressure (to the largest pD values investigated, 6-9 Torr cm) result in the retreat of the negative glow to the vicinity of the microcavity wall, thereby producing a diffuse but annular discharge. Even at the higher pD values, the axial discharge appears to facilitate ignition of the negative glow. The predictions of the simulations are consistent with the behavior of Al Al2 O3 microplasma devices for which D=100-300 μm.
|Original language||English (US)|
|Journal||Journal of Applied Physics|
|State||Published - 2006|
ASJC Scopus subject areas
- Physics and Astronomy(all)