Abstract
A novel microlens that is `raised' to a 400-μm height above the substrate and integrated with two-axis microactuators for two-dimensional scanning was demonstrated. This microlens can directly collimate or focus light emitted from the vertical-cavity surface-emitting lasers (VCSEL) below it. It can be made into two-dimensional arrays and suitable for monolithic or hybrid integration with VCSEL arrays. Hybrid integration of scanning microlens with 670-nm VCSEL was also demonstrated. Optical beam collimation and two-dimensional scanning with ±8° ranges were achieved.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 19-20 |
| Number of pages | 2 |
| Journal | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS |
| Volume | 11 |
| State | Published - 1997 |
| Externally published | Yes |
| Event | Proceedings of the 1997 Conference on Lasers and Electro-Optics, CLEO - Baltimore, MD, USA Duration: May 18 1997 → May 23 1997 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering