Two-dimensional scanning microlenses for vertical-cavity surface-emitting lasers

L. Fan, M. C. Wu, K. D. Choquette

Research output: Contribution to journalConference articlepeer-review


A novel microlens that is `raised' to a 400-μm height above the substrate and integrated with two-axis microactuators for two-dimensional scanning was demonstrated. This microlens can directly collimate or focus light emitted from the vertical-cavity surface-emitting lasers (VCSEL) below it. It can be made into two-dimensional arrays and suitable for monolithic or hybrid integration with VCSEL arrays. Hybrid integration of scanning microlens with 670-nm VCSEL was also demonstrated. Optical beam collimation and two-dimensional scanning with ±8° ranges were achieved.

Original languageEnglish (US)
Pages (from-to)19-20
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
StatePublished - 1997
Externally publishedYes
EventProceedings of the 1997 Conference on Lasers and Electro-Optics, CLEO - Baltimore, MD, USA
Duration: May 18 1997May 23 1997

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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