Two-dimensional integration of a vertical-cavity surface-emitting laser and photodetectors for position sensing

Antonios V. Giannopoulos; Ansas M. Kasten; Christopher M. Long; Chen Chen; Kent D. Choquette

doi:10.1364/AO.47.004555

Two-dimensional integration of a vertical-cavity surface-emitting laser and photodetectors for position sensing

Antonios V. Giannopoulos, Ansas M. Kasten, Christopher M. Long, Chen Chen, Kent D. Choquette

Research output: Contribution to journal › Article › peer-review

Abstract

Noncontact long-range position sensing is desirable for a number of applications. We have designed and fabricated a monolithically integrated vertical-cavity surface-emitting laser (VCSEL) and p-type/intrinsic/re-type (PIN) photodetectors for optical position sensing. Calculations using the reflection from a periodic metallic corrugation as a position gauge indicate resolution in the submicron regime. High device uniformity is obtained using novel fabrication techniques. We observe a threshold current of 0.52 mA for the VCSELs and a detector responsivity of 0.38A/W at 840nm. The optical cross talk between VCSELs and detectors is also quantified.

Original language	English (US)
Pages (from-to)	4555-4559
Number of pages	5
Journal	Applied Optics
Volume	47
Issue number	25
DOIs	https://doi.org/10.1364/AO.47.004555
State	Published - Sep 1 2008

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

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10.1364/AO.47.004555

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abstract = "Noncontact long-range position sensing is desirable for a number of applications. We have designed and fabricated a monolithically integrated vertical-cavity surface-emitting laser (VCSEL) and p-type/intrinsic/re-type (PIN) photodetectors for optical position sensing. Calculations using the reflection from a periodic metallic corrugation as a position gauge indicate resolution in the submicron regime. High device uniformity is obtained using novel fabrication techniques. We observe a threshold current of 0.52 mA for the VCSELs and a detector responsivity of 0.38A/W at 840nm. The optical cross talk between VCSELs and detectors is also quantified.",

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AU - Kasten, Ansas M.

AU - Long, Christopher M.

AU - Chen, Chen

AU - Choquette, Kent D.

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AB - Noncontact long-range position sensing is desirable for a number of applications. We have designed and fabricated a monolithically integrated vertical-cavity surface-emitting laser (VCSEL) and p-type/intrinsic/re-type (PIN) photodetectors for optical position sensing. Calculations using the reflection from a periodic metallic corrugation as a position gauge indicate resolution in the submicron regime. High device uniformity is obtained using novel fabrication techniques. We observe a threshold current of 0.52 mA for the VCSELs and a detector responsivity of 0.38A/W at 840nm. The optical cross talk between VCSELs and detectors is also quantified.

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Two-dimensional integration of a vertical-cavity surface-emitting laser and photodetectors for position sensing

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