Two-dimensional integration of a vertical-cavity surface-emitting laser and photodetectors for position sensing

Antonios V. Giannopoulos, Ansas M. Kasten, Christopher M. Long, Chen Chen, Kent D. Choquette

Research output: Contribution to journalArticle

Abstract

Noncontact long-range position sensing is desirable for a number of applications. We have designed and fabricated a monolithically integrated vertical-cavity surface-emitting laser (VCSEL) and p-type/intrinsic/re-type (PIN) photodetectors for optical position sensing. Calculations using the reflection from a periodic metallic corrugation as a position gauge indicate resolution in the submicron regime. High device uniformity is obtained using novel fabrication techniques. We observe a threshold current of 0.52 mA for the VCSELs and a detector responsivity of 0.38A/W at 840nm. The optical cross talk between VCSELs and detectors is also quantified.

Original languageEnglish (US)
Pages (from-to)4555-4559
Number of pages5
JournalApplied Optics
Volume47
Issue number25
DOIs
StatePublished - Sep 1 2008

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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