We present a two-Axis electrostatic MEMS scanner with highreflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm-1505nm and above 90% over the wavelength band of 1550-1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.
|Original language||English (US)|
|Number of pages||10|
|State||Published - Jun 3 2013|
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics