Two-Axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

Jae Woong Jeong; Bryan Park; Hohyun Keum; Seok Kim; John A. Rogers; Olav Solgaard

doi:10.1364/OE.21.013800

Two-Axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

Jae Woong Jeong, Bryan Park, Hohyun Keum, Seok Kim, John A. Rogers, Olav Solgaard

Research output: Contribution to journal › Article › peer-review

Abstract

We present a two-Axis electrostatic MEMS scanner with highreflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm-1505nm and above 90% over the wavelength band of 1550-1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.

Original language	English (US)
Pages (from-to)	13800-13809
Number of pages	10
Journal	Optics Express
Volume	21
Issue number	11
DOIs	https://doi.org/10.1364/OE.21.013800
State	Published - Jun 3 2013
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1364/OE.21.013800

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title = "Two-Axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors",

abstract = "We present a two-Axis electrostatic MEMS scanner with highreflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm-1505nm and above 90% over the wavelength band of 1550-1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.",

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AU - Jeong, Jae Woong

AU - Park, Bryan

AU - Keum, Hohyun

AU - Kim, Seok

AU - Rogers, John A.

AU - Solgaard, Olav

PY - 2013/6/3

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AB - We present a two-Axis electrostatic MEMS scanner with highreflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm-1505nm and above 90% over the wavelength band of 1550-1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.

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Two-Axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

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