Two-Axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

Jae Woong Jeong; Bryan Park; Hohyun Keum; Seok Kim; John A. Rogers; Olav Solgaard

doi:10.1364/OE.21.013800

Two-Axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

Jae Woong Jeong, Bryan Park, Hohyun Keum, Seok Kim, John A. Rogers, Olav Solgaard

Research output: Contribution to journal › Article › peer-review

Abstract

We present a two-Axis electrostatic MEMS scanner with highreflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm-1505nm and above 90% over the wavelength band of 1550-1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.

Original language	English (US)
Pages (from-to)	13800-13809
Number of pages	10
Journal	Optics Express
Volume	21
Issue number	11
DOIs	https://doi.org/10.1364/OE.21.013800
State	Published - Jun 3 2013
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

Online availability

10.1364/OE.21.013800

Library availability

Discover UIUC Full Text

Cite this

@article{e0ed31aa36e64d2197917cbc0551de58,

title = "Two-Axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors",

abstract = "We present a two-Axis electrostatic MEMS scanner with highreflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm-1505nm and above 90% over the wavelength band of 1550-1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.",

author = "Jeong, {Jae Woong} and Bryan Park and Hohyun Keum and Seok Kim and Rogers, {John A.} and Olav Solgaard",

year = "2013",

month = jun,

day = "3",

doi = "10.1364/OE.21.013800",

language = "English (US)",

volume = "21",

pages = "13800--13809",

journal = "Optics Express",

issn = "1094-4087",

publisher = "The Optical Society",

number = "11",

}

TY - JOUR

T1 - Two-Axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

AU - Jeong, Jae Woong

AU - Park, Bryan

AU - Keum, Hohyun

AU - Kim, Seok

AU - Rogers, John A.

AU - Solgaard, Olav

PY - 2013/6/3

Y1 - 2013/6/3

N2 - We present a two-Axis electrostatic MEMS scanner with highreflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm-1505nm and above 90% over the wavelength band of 1550-1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.

AB - We present a two-Axis electrostatic MEMS scanner with highreflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm-1505nm and above 90% over the wavelength band of 1550-1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.

UR - http://www.scopus.com/inward/record.url?scp=84878876197&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84878876197&partnerID=8YFLogxK

U2 - 10.1364/OE.21.013800

DO - 10.1364/OE.21.013800

M3 - Article

C2 - 23736634

AN - SCOPUS:84878876197

SN - 1094-4087

VL - 21

SP - 13800

EP - 13809

JO - Optics Express

JF - Optics Express

IS - 11

ER -

Two-Axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

Abstract

ASJC Scopus subject areas

Online availability

Library availability

Related links

Fingerprint

Cite this