Tungsten suicide and tungsten polycide anisotropic dry etch process for highly controlled dimensions and profiles

R. Bashir, A. E. Kabir, F. Hebert, C. Bracken

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)2118-2120
Number of pages3
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number4
StatePublished - Jul 1998
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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