@article{c9f01ad2d6314eb580e071539b0a32f4,
title = "Tungsten suicide and tungsten polycide anisotropic dry etch process for highly controlled dimensions and profiles",
author = "R. Bashir and Kabir, {A. E.} and F. Hebert and C. Bracken",
year = "1998",
month = jul,
language = "English (US)",
volume = "16",
pages = "2118--2120",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "4",
}