Tunable Ultra-Small Monolithically-Rolled-up Capacitors by Piezoelectric Actuation

Kristen Nguyen, Zhendong Yang, Allen Wang, Scott A. Wicker, Xiuling Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The miniaturization of passive electronic components is essential for radio-frequency integrated circuits (RFICs). In addition, with the surge of wireless technologies, the need for reconfigurable and tunable radio-frequency (RF) components has grown. Enabled by strain-induced self-rolled-up membrane (S-RuM) technology, three-dimensional (3D) tubular interdigital capacitors with greatly reduced footprints can be made with diameter-dependent capacitances. By integrating piezoelectric AlScN, diameter and thus capacitance tuning is demonstrated for the prototyped capacitors, with preliminary data showing a tuning ratio of 1.41 and response of 15.75 pF/V for capacitances of over 150 pF and areal footprints of 0.18 mm2. These S-RuM-enabled piezoelectrically-tunable capacitors are easily redesigned to target different capacitances, frequencies, and tuning ratios, with little effect on footprint or process complexity, representing a novel capacitance tuning scheme enabling extreme miniaturization.

Original languageEnglish (US)
Title of host publicationIEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages683-686
Number of pages4
ISBN (Electronic)9798350357929
DOIs
StatePublished - 2024
Externally publishedYes
Event37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States
Duration: Jan 21 2024Jan 25 2024

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Country/TerritoryUnited States
CityAustin
Period1/21/241/25/24

Keywords

  • AlScN
  • MEMS
  • miniaturization
  • Piezoelectric actuation
  • S-RuM
  • tunable capacitor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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