Triangular elastomeric stamps for optical applications: Near-field phase shift photolithography, 3D proximity field patterning, embossed antireflective coatings, and SERS Sensing

Audrey M. Bowen, Michael J. Motala, J. Matthew Lucas, Sidhartha Gupta, Alfred J. Baca, Agustin Mihi, A. Paul Alivisatos, Paul V. Braun, Ralph G. Nuzzo

Research output: Contribution to journalArticle

Abstract

The use of a decal transfer lithography technique to fabricate elastomeric stamps with triangular cross-sections, specifically triangular prisms and cones, is described. These stamps are used in demonstrations for several prototypical optical applications, including the fabrication of multiheight 3D photoresist patterns with near zero-width features using near-field phase shift lithography, fabrication of periodic porous polymer structures by maskless proximity field nanopatterning, embossing thin-film antireflection coatings for improved device performance, and efficient fabrication of substrates for surface-enhanced Raman spectroscopic sensing. The applications illustrate the utility of the triangular poly(dimethylsiloxane) decals for a wide variety of optics-centric applications, particularly those that exploit the ability of the designed geometries and materials combinations to manipulate light-matter interactions in a predictable and controllable manner. A decal transfer lithography technique is used to fabricate elastomeric stamps with triangular cross sections. These stamps, which contain triangular prisms or cones, are used in several prototypical optical applications that illustrate the utility of triangular poly(dimethylsiloxane) decals for manipulating light-matter interactions in a predictable and controllable manner.

Original languageEnglish (US)
Pages (from-to)2927-2938
Number of pages12
JournalAdvanced Functional Materials
Volume22
Issue number14
DOIs
StatePublished - Jul 24 2012

Keywords

  • antireflective coatings
  • embossing
  • phase shift lithography
  • polydimethylsiloxane
  • proximity field nanopatterning
  • surface-enhanced Raman spectroscopy

ASJC Scopus subject areas

  • Biomaterials
  • Electrochemistry
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

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