Abstract

A single-layer optical filter made from thin film gallium phosphide (GaP) is envisioned and a fabrication flow is outlined, with current progress on process development reported. Ion-implantation is simulated and performed on bulk GaP with He+, followed by a field-assisted thermal bonding technique that simultaneously bonds a thin GaP film onto a borofloat glass substrate and removes the GaP substrate. The resulting thin films have consistent thickness, both within and between runs, and RMS surface roughness of < 10 nm. Dry-etch processes that further reduce the thin film material are characterized and designs for etching gratings into them are developed. This process is shown to be a reliable means of creating thin films of consistent thickness and smoothness in GaP, for the purpose of establishing visible wavelength filters for spectroscopic applications.

Original languageEnglish (US)
Title of host publicationCS MANTECH 2020 - 2020 International Conference on Compound Semiconductor Manufacturing Technology, Digest of Papers
PublisherCS Mantech
Pages5-8
Number of pages4
ISBN (Electronic)9781893580305
StatePublished - 2020
Event2020 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2020 - Tuczon, United States
Duration: May 11 2020May 14 2020

Publication series

NameCS MANTECH 2020 - 2020 International Conference on Compound Semiconductor Manufacturing Technology, Digest of Papers

Conference

Conference2020 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2020
CountryUnited States
CityTuczon
Period5/11/205/14/20

Keywords

  • Anodic Bonding
  • Gallium Phosphide
  • Helium Ion Implantation
  • Optical Filter
  • Smart-Cut

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Transfer of thin film gallium phosphide onto glass for integrable optical filters'. Together they form a unique fingerprint.

Cite this