@inproceedings{4ba96cec85494f808c0938511b99a2fa,
title = "Transfer of thin film gallium phosphide onto glass for integrable optical filters",
abstract = "A single-layer optical filter made from thin film gallium phosphide (GaP) is envisioned and a fabrication flow is outlined, with current progress on process development reported. Ion-implantation is simulated and performed on bulk GaP with He+, followed by a field-assisted thermal bonding technique that simultaneously bonds a thin GaP film onto a borofloat glass substrate and removes the GaP substrate. The resulting thin films have consistent thickness, both within and between runs, and RMS surface roughness of < 10 nm. Dry-etch processes that further reduce the thin film material are characterized and designs for etching gratings into them are developed. This process is shown to be a reliable means of creating thin films of consistent thickness and smoothness in GaP, for the purpose of establishing visible wavelength filters for spectroscopic applications.",
keywords = "Anodic Bonding, Gallium Phosphide, Helium Ion Implantation, Optical Filter, Smart-Cut",
author = "Maanav Ganjoo and Carlson, {John A.} and Al-Mulla, {Saoud A.} and James Brown and Cunningham, {Brian T.} and Dallesasse, {John M.}",
note = "Funding Information: Research reported in this paper was supported by the National Institutes of Health under award number R21AI130562. The content is solely the responsibility of the authors and does not necessarily represent the official views of the National Institutes of Health. Atomic Force Microscopy was carried out in the Frederick Seitz Materials Research Laboratory Central Facilities at the University of Illinois. Funding Information: Research reported in this paper was supported by the National Institutes of Health under award number R21AI130562. The content is solely the responsibility of the authors and does not necessarily represent the official views of the National Institutes of Health. Publisher Copyright: {\textcopyright} CS MANTECH 2020 - 2020 International Conference on Compound Semiconductor Manufacturing Technology, Digest of Papers.; 2020 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2020 ; Conference date: 11-05-2020 Through 14-05-2020",
year = "2020",
language = "English (US)",
series = "CS MANTECH 2020 - 2020 International Conference on Compound Semiconductor Manufacturing Technology, Digest of Papers",
publisher = "CS Mantech",
pages = "5--8",
booktitle = "CS MANTECH 2020 - 2020 International Conference on Compound Semiconductor Manufacturing Technology, Digest of Papers",
}