@inproceedings{4ba96cec85494f808c0938511b99a2fa,
title = "Transfer of thin film gallium phosphide onto glass for integrable optical filters",
abstract = "A single-layer optical filter made from thin film gallium phosphide (GaP) is envisioned and a fabrication flow is outlined, with current progress on process development reported. Ion-implantation is simulated and performed on bulk GaP with He+, followed by a field-assisted thermal bonding technique that simultaneously bonds a thin GaP film onto a borofloat glass substrate and removes the GaP substrate. The resulting thin films have consistent thickness, both within and between runs, and RMS surface roughness of < 10 nm. Dry-etch processes that further reduce the thin film material are characterized and designs for etching gratings into them are developed. This process is shown to be a reliable means of creating thin films of consistent thickness and smoothness in GaP, for the purpose of establishing visible wavelength filters for spectroscopic applications.",
keywords = "Anodic Bonding, Gallium Phosphide, Helium Ion Implantation, Optical Filter, Smart-Cut",
author = "Maanav Ganjoo and Carlson, {John A.} and Al-Mulla, {Saoud A.} and James Brown and Cunningham, {Brian T.} and Dallesasse, {John M.}",
note = "Publisher Copyright: {\textcopyright} CS MANTECH 2020 - 2020 International Conference on Compound Semiconductor Manufacturing Technology, Digest of Papers.; 2020 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2020 ; Conference date: 11-05-2020 Through 14-05-2020",
year = "2020",
language = "English (US)",
series = "CS MANTECH 2020 - 2020 International Conference on Compound Semiconductor Manufacturing Technology, Digest of Papers",
publisher = "CS Mantech",
pages = "5--8",
booktitle = "CS MANTECH 2020 - 2020 International Conference on Compound Semiconductor Manufacturing Technology, Digest of Papers",
}