Transfer of graphene layers grown on SiC wafers to other substrates and their integration into field effect transistors

Keyphrases

• Field-effect Transistors 100%
• Graphene 100%
• Graphene Layer 100%
• SiC Wafer 100%
• Thermal Annealing 50%
• Silicon Substrate 50%
• Epitaxial 50%
• Raman Spectroscopy 50%
• Polyimide 50%
• Hydrogen Atmosphere 50%
• Bilayer Film 50%
• Source-drain Electrode 50%
• Hole Mobility 50%
• Ambipolar Characteristics 50%
• 6H-SiC 50%
• Peeling Process 50%
• Graphene on Silicon Carbide 50%

Material Science

• Field Effect Transistor 100%
• Graphene 100%
• Silicon 25%
• Annealing 25%
• Film 25%
• Silicon Carbide 25%
• Polyimide 25%
• Raman Spectroscopy 25%
• Hole Mobility 25%

Engineering

• Graphene 100%
• Field-Effect Transistor 100%
• Layer Graphene 100%
• Silicon Substrate 33%
• Drain Electrode 33%