TY - GEN
T1 - Towards planar GaAs nanowire array high electron mobility transistor
AU - Miao, Xin
AU - Li, Xiuling
PY - 2011
Y1 - 2011
N2 - We have demonstrated the first planar III-V nanowire (NW) based high electron mobility transistor (NW-HEMT) with self-assembled <110> planar GaAs NWs capped with Si-doped AlGaAs sheath as the channel. In contrast to vertical NW-FETs and post-growth aligned NW-FETs, self-assembled planar NW-FETs are well compatible with planar processing and can be deterministically positioned by patterning the Au catalysts [1][2]. The core-shell NW-HEMT heterostructure leaves the GaAs NWs undoped which avoids the issue of NW doping non-uniformity [3][4]. Therefore, device electrical uniformity can be achieved from uniform NWs because the epitaxial growth of AlGaAs thin film is well understood and controllable both in thickness and doping concentration.
AB - We have demonstrated the first planar III-V nanowire (NW) based high electron mobility transistor (NW-HEMT) with self-assembled <110> planar GaAs NWs capped with Si-doped AlGaAs sheath as the channel. In contrast to vertical NW-FETs and post-growth aligned NW-FETs, self-assembled planar NW-FETs are well compatible with planar processing and can be deterministically positioned by patterning the Au catalysts [1][2]. The core-shell NW-HEMT heterostructure leaves the GaAs NWs undoped which avoids the issue of NW doping non-uniformity [3][4]. Therefore, device electrical uniformity can be achieved from uniform NWs because the epitaxial growth of AlGaAs thin film is well understood and controllable both in thickness and doping concentration.
UR - http://www.scopus.com/inward/record.url?scp=84863179023&partnerID=8YFLogxK
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U2 - 10.1109/DRC.2011.5994442
DO - 10.1109/DRC.2011.5994442
M3 - Conference contribution
AN - SCOPUS:84863179023
SN - 9781612842417
T3 - Device Research Conference - Conference Digest, DRC
SP - 115
EP - 116
BT - 69th Device Research Conference, DRC 2011 - Conference Digest
T2 - 69th Device Research Conference, DRC 2011
Y2 - 20 June 2011 through 22 June 2011
ER -