Token delays and generalized workload balancing for timed event graphs with application to cluster tool operation

Tac Eog Lee, Hwan Yong Lee, Ramavarapu S. Sreenivas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

There have been numerous works on controlling task delays in discrete event systems such as automated manufacturing systems. Since the systems are often modelled by timed event graphs, the task delays correspond to token delays in the models. We characterize the token delays based on imbalance between the circuit ratios. We prove that the token delays can be eliminated by balancing the circuit ratios. We propose strategies for balancing circuit ratios or workloads for timed event graphs and apply them to eliminating wafer delays in a cluster tool. We demonstrate that token delay analysis based on circuit ratio imbalance and circuit ratio balancing are effective for identifying and eliminating wafer delays in a cluster tool. We discuss how circuit ratio and circuit ratio balancing can be considered as generalizations of conventional workload and workload balancing for flow lines.

Original languageEnglish (US)
Title of host publication2006 IEEE International Conference on Automation Science and Engineering, CASE
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages93-99
Number of pages7
ISBN (Print)1424403103, 9781424403103
DOIs
StatePublished - Jan 1 2006
Event2006 IEEE International Conference on Automation Science and Engineering, CASE - Shanghai, China
Duration: Oct 8 2006Oct 10 2006

Publication series

Name2006 IEEE International Conference on Automation Science and Engineering, CASE

Other

Other2006 IEEE International Conference on Automation Science and Engineering, CASE
CountryChina
CityShanghai
Period10/8/0610/10/06

Keywords

  • Cluster tool
  • Timed event graph
  • Token delay
  • Wafer delay
  • Workload balancing

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Token delays and generalized workload balancing for timed event graphs with application to cluster tool operation'. Together they form a unique fingerprint.

Cite this